Production line of neodymium-iron-boron surface metallized magnetic-control sputtering coating film

Abstract

The invention discloses a production line of a neodymium-iron-boron surface metallized magnetic-control sputtering coating film. The production line comprises an overturning module, a hoisting module,a sheet feeding and discharging module, a vacuum film plating module and a sheet discharging hoisting module, wherein the vacuum film plating module is composed of a plurality of vacuum cavities anda plurality of cavity brackets; all the vacuum cavities are mounted on a cavity bracket; the cavity body is internally provided with an inner conveying system; a maintenance travelling crane is arranged above the vacuum cavity; a substrate returning system is mounted on the cavity brackets; the vacuum film plating module is divided into seven sections including an inlet vacuum section, an inlet buffering vacuum section, an inlet transition vacuum section, a film coating technology vacuum section, an outlet transition vacuum section, an outlet buffering vacuum section and an outlet vacuum section. By adopting the production line, large-batch continuous production of small-size ceramic sheet magnetic-control sputtering metallized coating films is realized, and the capacity per day can reach60000 to 100000 pieces; especially, the production line is suitable for coating films of surface double-faced metallized function films of neodymium-iron-boron magnetic ceramic sheets and can meet marketization requirements.

Description

technical field [0001] The invention relates to the technical field of metallized magnetron sputtering coating on the surface of NdFeB ceramics, in particular to a production line for metallizing magnetron sputtering coating on the surface of NdFeB ceramics. Background technique [0002] Sputtering targets of precious metals and their alloys manufactured by refining, melting forging, calendering or powder metallurgy are widely used in semiconductor devices, display devices, recording media, magnetically modified materials, and wave absorption modification. For example, Au, Pt, Pd, and Ag targets are used for integrated circuits and large-scale integrated circuits, alloy targets such as CoCrPt, CoPt, and CoPd are used for magnetic recording, Te (terbium), Dy (dysprosium) targets are used for NdFeB Magnetic modification of ceramics, etc. [0003] With the rapid development of the hybrid electric vehicle (HEV) industry, NdFeB magnets for automobiles are required to have high c...

AI Technical Summary

Problems solved by technology

There is a huge demand for NdFeB magnets that are modified by the boundary diffusion and dysprosium infiltration technology. However, most of the existing production lines that spray terbium and dysprosium on the surface of NdFeB ceramics cannot be mass-produced continuously. Harmful to the human body, unfriendly to the environment, low production efficiency, difficult to meet market demand

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