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3D scanning lidar based on mems micromirror

A technology of three-dimensional scanning and laser radar, which is applied in the field of three-dimensional scanning laser radar, can solve the problems of inability to control large-scale light spots, difficulty in realizing long-distance detection, small plane size of MEMS micromirrors, etc., and achieve low power consumption, reliable quality, and control The effect of simple circuits and algorithms

Active Publication Date: 2020-01-24
SHENZHEN KYLE OPTICS TECH CO LTD
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Problems solved by technology

The patent also ignores the size of the MEMS micromirror. At present, the plane size of a single MEMS micromirror is small, and it cannot control a large-sized spot, and it is difficult to achieve long-distance detection. This is also the MEMS micromirror application that must be optimized in the lidar industry. key design

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  • 3D scanning lidar based on mems micromirror
  • 3D scanning lidar based on mems micromirror
  • 3D scanning lidar based on mems micromirror

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Embodiment 1

[0027] In order to solve the above-mentioned problems, this embodiment proposes a scheme for the design of a two-dimensional MEMS small mirror array, such as figure 2 shown. The MEMS micromirror is decomposed into multiple small micromirror units. Each small micromirror unit can achieve large-angle rotation and does not take up too much space in the thickness direction. It can be manufactured based on existing semiconductor processes and is easy to mass produce. Each small micromirror unit forms a large-size MEMS micromirror array 3, which can realize long-distance detection for large-size spots, solve the problem of application limitations of MEMS micromirrors in large-size spot lidars, and help realize long-distance detection of lidars .

[0028] Such as figure 1 As shown, the present embodiment provides a three-dimensional scanning laser radar based on MEMS micromirrors, including a transmitting laser 1, a collimating optical element 2, a MEMS micromirror array 3 and a d...

Embodiment 2

[0036] This implementation proposes a two-dimensional MEMS small mirror array design scheme, which decomposes the MEMS micromirror into multiple small micromirror units, and each small micromirror unit can rotate at a large angle without taking up too much space in the thickness direction , can be manufactured based on the existing semiconductor technology, and is easy to be mass-produced. A plurality of small micromirror units form a MEMS micromirror array 3 .

[0037] image 3 It is a schematic diagram of the optical path principle of Embodiment 2 of the MEMS micromirror-based three-dimensional scanning laser radar of the present invention. Such as image 3As shown, the present embodiment provides a three-dimensional scanning laser radar based on a MEMS micromirror, including an emitting laser array 4, a collimating optical element 2, a MEMS micromirror array 3 and a detector; the detection laser signal sent by the emitting laser passes through the collimating optical The ...

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Abstract

The invention belongs to the technical field of laser radars, and discloses a three-dimensional scanning laser radar based on MEMS (Micro-Electro Mechanical System) micromirrors. The three-dimensionalscanning laser radar based on MEMS micromirrors includes an emitting laser, a collimated optical element, an MEMS micromirror array and a detector, wherein a detection laser signal emitted by the emitting laser is collimated by the collimated optical element to the MEMS micromirror array, and then is emitted to a detection target through the MEMS micromirror array; the detection laser signal reflected by the detection target is received by the detector; and the MEMS micromirror array includes a plurality of small micromirror units which are arranged in a two-dimensional array, and all the small micromirror units are rotatable in the three-dimensional direction. The design of replacing a single small-sized MEMS micromirror with a large-sized two-dimensional MEMS micromirror array can solvethe application limitation of the MEMS micromirrors in a large-size spot laser radar, thus being conductive to implementation of long-distance detection of the laser radar.

Description

technical field [0001] The invention belongs to the technical field of laser radar, and in particular relates to a three-dimensional scanning laser radar based on a MEMS micromirror. Background technique [0002] Lidar is a device that scans the surrounding space and obtains spatial parameters by emitting laser signals. It is widely used in geographic mapping, environmental detection, industrial scanning or unmanned driving and other industries. At present, the beam scanning method of lidar is mainly motor scanning, but the scanning motor has obvious defects such as large size, high power consumption, complex control circuit and algorithm, which limits the development of miniaturization, integration and low power consumption of lidar The speed of development in other directions also restricts the further popularization and application of lidar. [0003] Micro-Electro Mechanical System (hereinafter referred to as MEMS) micromirror is based on mature semiconductor processing ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01S7/481
CPCG01S7/4817
Inventor 张石李亚锋鲁佶
Owner SHENZHEN KYLE OPTICS TECH CO LTD
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