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Mask substrate, mask assembly, display panel and display device

A mask substrate and display panel technology, which is applied in the direction of electrical components, electrical solid-state devices, semiconductor devices, etc., can solve problems that affect product evaporation yield and production capacity, circular edge color mixing, etc.

Active Publication Date: 2018-12-18
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, double-layer masks are prone to rounded edge color mixing (e.g. figure 1 Shown in the F area) bad problem, which also seriously affects the vapor deposition yield and production capacity of the product

Method used

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  • Mask substrate, mask assembly, display panel and display device
  • Mask substrate, mask assembly, display panel and display device
  • Mask substrate, mask assembly, display panel and display device

Examples

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Embodiment Construction

[0049] The following describes the embodiments of the present invention in detail, and those skilled in the art will understand that the following embodiments are intended to explain the present invention, and should not be regarded as limiting the present invention. Unless otherwise specified, in the following examples that do not explicitly describe specific techniques or conditions, those skilled in the art can carry out according to commonly used techniques or conditions in this field or according to product instructions.

[0050] In one aspect of the invention, the invention provides a mask blank.

[0051] According to an embodiment of the present invention, refer to Figure 4~5, the mask substrate 100 includes a half-etched region H and a non-etched region U, the non-etched region U is arranged around the half-etched region H, and the half-etched region H has a plurality of openings 110 distributed in an array, and any one The minimum distance d′ from the opening 110 to...

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Abstract

The invention provides a mask substrate, a mask assembly, a display panel and a display device. The mask substrate comprises a partial-etching region and a non-etching region; the non-etching region is arranged around the partial-etching region; the partial-etching region is provided with a plurality of openings formed in an array; and the minimum distance between any one of the openings and the non-etching region is not less than the distance between any two adjacent openings. According to the mask substrate provided by the invention, the distance between the openings, close to the non-etching region, of the mask substrate and the non-etching region is increased, positions liable to be wrinkled of the mask substrate and a mask strip in the stretched state can be kept away from the openings, the interference effect of deformation of the mask substrate in the stretched state on the mask strip is reduced while the uniformity of the mask substrate is ensured, and thus the yield of evaporated products manufactured through the mask assembly is improved.

Description

technical field [0001] The present invention relates to the technical field of flat panel display manufacturing, and in particular, the present invention relates to a mask substrate, a mask assembly, a display panel and a display device. Background technique [0002] Flat-panel displays include liquid crystal display (LCD), organic light-emitting diode display (OLED), plasma display (PDP) and electronic ink display, etc. Among them, OLED display has light and thin, low power consumption, high contrast, high color gamut, and can realize flexible display And other advantages, thus becoming the development trend of the next generation of display. The OLED display can be divided into passive matrix (PM) OLED and active matrix (AM) OLED, and the implementation of AMOLED display is divided into low temperature polysilicon (LTPS) backplane + fine metal mask (FMM) method and oxide (Oxide) ) backplane + white (W) OLED + color film. The first method is mainly used in small-sized pan...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24H01L51/00
CPCC23C14/042C23C14/24H10K71/164H10K71/166
Inventor 张健黄俊杰王震李冬伟
Owner BOE TECH GRP CO LTD
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