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SPR neural synaptic device based on a-SiOxNy memristor effect and preparation method thereof

A technology of neural synapse and memristor, which is applied in the field of bionic devices, can solve the problems of small signal processing bandwidth and easy crosstalk in signal transmission, and achieve the effects of large signal processing bandwidth, strong anti-electromagnetic interference ability, and reduced optical loss

Active Publication Date: 2018-12-21
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above, the present invention provides a bionic synapse based on a-SiO for the problems of small signal processing bandwidth and prone to crosstalk in the signal transmission process when existing memristor-based bionic synapses work. x N y Light-reading SPR neurosynaptic device with memristive effect and its preparation method

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  • SPR neural synaptic device based on a-SiOxNy memristor effect and preparation method thereof
  • SPR neural synaptic device based on a-SiOxNy memristor effect and preparation method thereof
  • SPR neural synaptic device based on a-SiOxNy memristor effect and preparation method thereof

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Embodiment 1

[0035] A based on a-SiO x N y SPR neurosynaptic device with memristive effect, its structure is as follows figure 1 Shown: include a memristor and a crystalline silicon prism 6 arranged above the memristor. In this embodiment, the crystalline silicon prism 6 is a triangular prism processed from crystalline silicon. The memristor has "Bottom electrode 1 / first a-SiO x N y Resistive switch layer 2 / second a-SiO x N y Resistive variable layer 3 / top electrode 4" vertical four-layer structure. In this embodiment, the top electrode 4 is metal silver Ag deposited on the bottom surface of the crystalline silicon prism 6, and the second a-SiO x N y The resistive layer 3 is a-SiO containing Ag nanoparticles x N y thin film with a volume fraction of Ag nanoparticles of 40%, the first a-SiO x N y The resistive switch layer 2 is a-SiO containing Ag nanoparticles x N y film, whose volume fraction of Ag nanoparticles is 5%, and the top electrode 4 is deposited on the first a-SiO x...

Embodiment 2

[0044] A based on a-SiO x N y SPR neurosynaptic device with memristive effect, its structure is as follows figure 1 Shown: comprise memristor and be arranged on the crystalline silicon wafer 5 above described memristor and be arranged on the crystalline silicon prism 6 above described crystalline silicon wafer 5, in the present embodiment, crystalline silicon prism 6 is processed by crystalline silicon The formed triangular prism, the crystalline silicon wafer 5 is also processed from crystalline silicon, and the crystalline silicon wafer 5 and the crystalline silicon prism 6 are preferably bonded with a refractive index matching liquid, and the memristor has a bottom-to-top Electrode 1 / first a-SiO x N y Resistive switch layer 2 / second a-SiO x N y Resistive variable layer 3 / top electrode 4" vertical four-layer structure, top electrode 4 top electrode 4 in this embodiment is metal silver Ag deposited on the bottom surface of crystalline silicon prism 6, the second a-SiO x...

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Abstract

The present invention relates to a SPR synaptic device with SiOxNy memristor effect and a preparation method thereof, belonging to the technical field of biomimetic devices. The invention combines thecrystalline silicon prism with the top electrode / a-SiOxNy: metal nanoparticle double resistive layer / bottom electrode memristor structure coupling, thereby making the optical signal modulated by thecrystal silicon prism into the double resistive layer. A surface plasmon resonance (SPR) effect is utilize to read the dielectric constant change information of the resistive layer during the workingprocess of the device by the optical signal, thereby realizing the optical read of the synaptic weight of the device. The electrically modulated and optically read synaptic device of the invention hasthe advantages that the traditional electrically modulated and electrically read synaptic device cannot be compared with, because the synaptic device not only has the characteristics of low energy consumption and non-volatility of the traditional memristor, but also has the advantages of large signal processing bandwidth and strong electromagnetic interference resistance when the light is used asan information carrier.

Description

technical field [0001] The invention belongs to the technical field of bionic devices, in particular to a-SiO-based x N y SPR neurosynaptic device with memristive effect and its preparation method. Background technique [0002] Traditional computers are based on the "Von Neumann Architecture". However, in the "Von Neumann Architecture", the data call and transmission between the information memory and the processor are connected through the bus, which makes the efficiency of information processing It is not only affected by the computing speed and storage speed of the processor, but also restricted by the information transmission capacity of the bus, forming the so-called "Von Neumann bottleneck". Although the amount of information processed by the human brain is not less than that of a computer, it is obviously more efficient and consumes less energy. To this end, researchers have constructed the concept of an intelligent computer, expecting the computer to learn neural ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L45/00
CPCH10N70/257H10N70/011
Inventor 李伟宋宇浩次会聚董湘袁余涵李东阳蒋向东
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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