Cutting path planning method applied to folded waveguide slow wave structure

Abstract

The invention relates to a cutting path planning method applied to a folded waveguide slow wave structure. The cutting path planning method comprises the following steps: removing oxide scales on thesurface of a material by adopting a milling cutter; selecting a point, positioned outside the starting edge of an S-shaped groove, on a center line of a straight groove as a cutter adjusting point; performing Z-direction cutter adjustment on a workpiece by adopting a CCD cutter adjusting system; dividing the processing stage, planning a cutting path of a micro-milling cutter and adopting a cuttingplan for layered processing of the slow wave structure in the depth direction; finally removing residual burrs through an auxiliary process. The cutting path planning method provided by the inventionhas the benefits that the ultra-precision micro-milling process of the multi-period, large-aspect ratio and thin-walled complex slow-wave structure is realized, and the problems that in the ultra-precision micro-milling process of the part, an island structure is prone to bending and collapsing, the burrs formed at the intersection of the straight groove and the S-shaped groove are hard to remove, the side wall of a deep groove is easy to incline and the like are solved, to meet the relatively stringent processing requirements.

Description

technical field [0001] The invention belongs to the field of ultra-precise micro-milling processing, and relates to a method for planning a knife trajectory applied to a folded waveguide slow-wave structure, in particular to a planning method for a knife trajectory during micro-milling of a folded waveguide slow-wave structure with a working frequency of 0.34THz method. Background technique [0002] In view of the characteristics of terahertz waves such as strong penetration, high use safety, high orientation and high bandwidth, terahertz technology has become an extremely important cutting-edge technology in the world. In national defense and military affairs, broadband radar designed with terahertz technology can realize sensitive detection and precise positioning of tiny targets; in the field of information technology, terahertz technology can provide strong guarantee for military communication encryption and space communication. In addition, terahertz technology can als...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for planning the tool trajectory applied to the folded waveguide slow-wave structure, so as to solve the problem that the island structure is prone to bending and collapse during the ultra-precision micro-milling process of such parts, and the straight groove and S-shaped groove The burr formed at the junction is not easy to remove, and the side wall of the deep groove is easy to tilt, etc.

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