Point source array generator based on spatial light modulator and its obtaining method
A technology of spatial light modulator and point light source, used in instruments, optical devices, measuring devices, etc., can solve the problems of flexibility in spherical aberration measurement, inability to control beams in real time, etc., and achieve a large measurement range, high flexibility, and quantity many effects
Active Publication Date: 2020-08-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
Overcome the problem of spherical aberration and poor measurement flexibility brought by the point source array based on the microlens array, and also overcome the mechanical inertia of the point source generator based on the fiber array, and the problem that the beam cannot be controlled in real time
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[0036] The present invention will be described in further detail below in conjunction with accompanying drawing, but protection scope of the present invention should not be limited
[0037] combine figure 1 , the point light source array generator includes a laser 1, and along the laser output direction of the laser 1 are a beam expander 2, a collimator 3, a polarizer 4, a spatial light modulator 5, and an imaging lens 7 in sequence.
[0038] A spatial light modulator 5 is provided between the polarizer 4 and the imaging lens 7 , and a control terminal of the spatial light modulator 5 is connected to a computer 6 .
[0039] The method for obtaining the point light source array based on the spatial light modulator comprises the following steps:
[0040] 1) According to the specification of the free-form surface to be measured, the optical parameters of the free-form surface to be measured are obtained, including: aperture D, surface gradient extremum α, and the radius of curva...
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The invention discloses a spot light source array generator based on a spatial light modulator. The spot light source array generator includes a laser device, a beam expanding lens, a collimating lens, a polarizer, the spatial light modulator, a computer and an imaging lens. The spot light source array obtaining method includes steps that an off-axis parabolic mirror structure and optical parameters required by the spot light source array generator are calculated, and a corresponding grayscale image is designed; the designed grayscale image is loaded onto the spatial light modulator through the computer, the light emitted by the laser device passes through a beam expanding collimation system and the polarizer and then forms the parallel light incident on the two-dimensional spatial light modulator, after modulation through the spatial light modulator, a two-dimensional spot light source array is obtained at a focal plane of the lens. The spot light source array obtaining method has advantages of easy realization, high flexibility, high precision of the obtained spot light source array and strong universality, and requirements of the spot light source array generator for a tilted wavefront non-zero interference system are met.
Description
technical field [0001] The invention relates to a point light source array generator, in particular to a core device of a multiple oblique wavefront non-zero position interference system that can be widely used in the surface shape detection of large gradient aspheric surfaces and free-form surfaces. Background technique [0002] Due to its high degree of freedom, large gradient change, and flexible surface structure, the free-form surface has a very high degree of design freedom, which meets the requirements of modern optical systems for compactness, miniaturization, and light weight, and obtains better optics. Performance, so it has received more and more attention in the fields of military, aerospace and other fields. However, high-precision free-form surface processing depends on high-precision surface shape detection. At present, the surface shape detection method for aspheric surfaces and free-form surfaces with large gradient changes in the world is mainly interferom...
Claims
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IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02034G01B11/2441
Inventor 路晴魏朝阳邵建达胡晨
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI