Graphite boat saturation process

Abstract

The invention provides a graphite boat saturation process comprising the steps: removing silicon nitride deposited on the surface of a graphite boat flake by using 15%-20% of hydrofluoric acid, then,rinsing the graphite boat flake by using purified water, after completing rinsing, drying the graphite boat flake by using a drying oven, pretreating the graphite boat flake by PECVD, introducing silane and nitrous oxide N2O, opening radio-frequency powder to make interstructural silica of the graphite boat flake is electrically neutral and the thermochemical stability of oxides strong, and repeatedly depositing silicon oxynitride until the total deposition time reaches 2500 s. The graphite boat saturation process provided by the invention adopts an intermittent multi-deposition way, so that the time of the whole process is shortened, the process time is optimized, the uniformity of silicon nitride on the surface of a graphite boat is made to be better, the uniformity of heat and electricconduction on the surface of the graphite boat during a process is favorably realized, silicon oxynitride is additionally arranged on an inner layer, so that the graphite boat is sufficiently protected during radio frequency of the process, and the service life of the graphite boat is prolonged.

Description

technical field [0001] The invention relates to the technical field of graphite boats, in particular to a graphite boat saturation process. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition method) is an indispensable part of the silicon solar cell manufacturing process. With the continuous improvement of PECVD technology, tubular PECVD has significantly improved the efficiency of solar cells. . However, the saturation effect of the graphite boat affects the coating effect of the tubular PECVD to a considerable extent. If the saturation process of the graphite boat cannot be controlled well, it will lead to an increase in the color difference film, which seriously restricts the production capacity and efficiency. [0003] In the prior art, the saturation process of the graphite boat adopts hydrofluoric pickling, water washing, drying for 3-4 hours, and saturation for 3 hours under the reaction of silane...

AI Technical Summary

Problems solved by technology

However, the saturation effect of the graphite boat affects the coating effect of the tubular PECVD to a considerable extent. If the saturation process of the graphite boat cannot be controlled well, it will lead to an increase in the color difference film, which seriously restricts the production capacity and benefits.

[0003] In the prior art, the saturation process of the graphite boat adopts hydrofluoric pickling, water washing, drying for 3-4 hours, and saturation for 3 hours under the reaction of silane and ammonia. The process time of the graphite boat from cleaning to saturation is longer, and the graphite boat It shows that the thickness of silicon nitride is inconsistent, and its electrical and thermal conductivity changes, and it is easy to produce color difference film during production.