Multi-mode coupling miniature electric field sensing device based on piezoelectric effect and piezoresistive effect

Abstract

The invention discloses a multi-mode coupling miniature electric field sensing device based on a piezoelectric effect and a piezoresistive effect. The miniature electric field sensing device comprisesa horizontally placed semiconductor thin film, a horizontally placed substrate is arranged under the semiconductor thin film, a cavity structure is formed between the semiconductor thin film and thesubstrate through support of a middle interlayer, an upper surface of the semiconductor thin film is evenly provided with a piezoresistive material, the piezoresistive material comprises a transverse-transverse mode piezoelectric film and a transverse-longitudinal mode piezoelectric block, and in a transverse-transverse mode, a top surface of the semiconductor thin film is provided with the piezoelectric film; and in a transverse-longitudinal mode, a bottom surface of the semiconductor thin film is provided with the piezoelectric block. The multi-mode coupling miniature electric field sensingdevice based on the piezoelectric effect and the piezoresistive effect, provided by the invention, has the beneficial effects of being small in volume and highly integrated, effectively reducing circuit temperature drift, reducing zero drift, improving measurement accuracy, being capable of realizing electric field accurate measurement under wide band, high field intensity and complex environment,and also being capable of being mounted and maintained in the case of being electrified.

Description

technical field [0001] The invention relates to the field of electric field sensing, in particular to a miniature electric field sensing device based on piezoelectric effect and piezoresistance effect multi-mode coupling that takes into account the characteristics of wide frequency domain and wide dynamic range of electric field measurement. Background technique [0002] Smart grid has become a major direction for the transformation and development of the energy industry around the world. The basic core of the smart grid is to build a matching information network to realize the transparency and real-time information of key nodes in the power network. Deep learning and big data analysis of a large amount of data can effectively improve the self-diagnosis and self-recovery of the power network, and realize efficient, safe, stable, high-value and low-cost flexible operation. [0003] As the basic electrical quantity of the power system, voltage plays a key role in the operatio...

AI Technical Summary

Problems solved by technology

The advantages of MEMS electric field sensors are high resolution and easy miniaturization, but the limitations of the principle lead to low measurement electric field, narrow measurement bandwidth, high energy consumption, etc.

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