The invention provides a double-frequency
laser raster interference measuring method and a measuring
system thereof. The method comprises the following steps: utilizing a double-frequency
laser to output double-frequency
laser, converting a
direct current signal system of common raster interference measurement into an
alternating current signal system, allowing the double-frequency laser to go through a spectroscope to form a reference
optical path and a measuring
optical path, through motion of a raster, allowing beat frequency of measuring
optical path optical beat interference fields to change, and finally using a digital phase measuring method to carry out high multiple electrical
subdivision on a high multiple optical
subdivision signal obtained by each optical beat interference field to complete measurement. The measuring system comprises the double-frequency laser and the first spectroscope, reflected and
transmitted light beam go through the first spectroscope and form the reference optical path and the measuring optical path respectively, the reference optical path is provided with a polarization analyzer and a photoelectric
detector, the measuring optical path is provided with a raster
diffraction interference system, and an output optical path of the raster
diffraction interference system is provided with a photoelectric
detector. The method and the system have the advantages of strong anti-interference capability, good stability, convenient usage, high measuring precision and the like.