47results about How to "Small zero drift" patented technology

The invention relates to a super-low micro-pressure sensor of 0-100pa single-chip silicon based SOI, which has the advantages of comparatively high sensitivity and linearity, high-temperature resistance, simple technique, good consistency, low production cost and being suitable for mass production. Therefore, the invention also provides a method for processing the sensor. The chips includes an N-shaped or P-shaped silicon substrate (1), two sides of which are covered with an insulation layer (2), a polysilicon layer (3) is deposited on the surface of the insulation layer (2); the surface of the polysilicon layer is a silicon dioxide layer (4), the surface of which is a polysilicon film layer which can generate polysilicon piezo-resistance (5); polysilicon inner lead (6) doped with dense boron is connected with the resistance (5); the surface of the polysilicon internal lead (6) is covered with aluminum lead (7); the back of the chip is provided with a square-shaped opening (10); polysilicon is taken as the substrate (1), which then goes through the processes of photoetching, depositing, injecting by adopting an ion beam machine, annealing, feeding dry oxygen-wet oxygen-dry oxygen, photoetching, TMAH wet etching or RIE dry etching, photoetching, dense-boron dispreading, front steaming and plating aluminm film, leading-out weld feet and wet-etching, etc.

The invention relates to a single chip silicon substrate SOI sensor with ultra-low micropressure of between 0 and 50 pa. The sensor has high sensitivity and linearity, high temperature resistance and simple process and is suitable for large-scale production. Therefore, the invention also provides a method for processing the sensor. A chip comprises a silicon underlayer (1); insulating layers (2) are covered on two surfaces of the silicon underlayer; a monocrystal silicon film with a thickness of 0.3 micron on the surface of the insulating layer (2) generates a resistor (3); an inner lead wire (4) is connected with the resistor (3); an opening of the back of the chip is provided with an island flap (7) or a flat film no island flap; and a composite elastic film (8) with silicon nitride and silicon dioxide is arranged between the island flap and a frame. Monocrystal silicon is used as the underlayer (1), then an opening (6) is carved on the back of the underlayer; oxygen ions are injected on the front of the silicon chip; the silicon chip is processed by anneal to form a silicon dioxide insulating layer and the monocrystal silicon film; an oxide layer and a P-type conducting layer are thermally grown on the front of the silicon chip, then a resistor area (3) and an inner lead heat pressing pin area (4) are formed on the front of the silicon chip; the monocrystal silicon film on the other areas of the front is eroded to expose the silicon dioxide layer; and the silicon nitride film deposited on the front and the back of the silicon chip and the silicon dioxide on the front are combined into a complementary composite insulating layer.

The embodiment of the invention provides a calibration method of gyroscope zero drift. The method comprises the steps that step 1, after a robot is started, the angular velocity of the gyroscope is read at each of the time intervals, in the reading process of the angular velocity, angular integration is conducted to obtain the angle of the gyroscope, and step 2 is executed; step 2, a zero drift value is determined according to the angular velocity read under the static condition of the gyroscope, and step 3 is executed; step 3, the zero drift value is subtracted from the angle of the gyroscopein the reading process to obtain the calibrated angle of the gyroscope. The method has the advantages of being simple and easy to implement, and the influence of the gyroscope zero drift value is solved to improve the accuracy of the data output of the gyroscope.

The invention provides a pipeline pressure real-time monitoring device. The current signals of a pipeline pressure sensor, a flow sensor and a temperature sensor are adjusted to the voltage signals via a signal adjusting circuit. The voltage signals pass through a multi-access electronic switch and a sampling maintaining circuit and are converted by an A/D conversion circuit. A microprocessor collects the digital signals periodically as well as records and stores calendar time information, flow information and temperature information completely in an EEPROM (Electrically Erasable Programable Read-Only Memory) and then transmits the data in the EEPROM through level conversation and communication network by a UART (Universal Asynchronous Receier/Transmitter) module to a host computer or a remote monitoring centre in real time. The invention solves the problems that data collection of the traditional pipeline leakage monitoring system has low resolution, low reliability and poor robustness and has the characteristics of small amount of construction, low cost and convenient installation and maintenance on the premise that the precision and the real-time pressure signal collection are satisfied.

The invention relates to a polarization spectrum frequency stabilization system for inhibiting frequency locking zero drift. The system comprises a laser device 1, a first lambda/2 wave plate 2, a first PBS3, a second lambda/2 wave plate 5, a second PBS6, a first 45-degree reflector 7, a lambda/4 wave plate 9, a second 45-degree reflector 11, an atomic gas chamber 8 and a first 50:50 non-polarization beam splitter 10, a liquid crystal extender 12, a third PBS20, a second 50: 50 non-polarization beam splitter 21, a third 50:50 non-polarization beam splitter 14, a first differential photoelectric detector 19, a second differential photoelectric detector 15, a first PID23 and a second PID13. The system is advantaged in that on the basis of polarization spectrum frequency stabilization, the zero drift amount of a spectrum is extracted through an optical method, a liquid crystal retarder is fed back and adjusted through a feedback loop, so the center of a spectrum signal is always a lockingzero point, and a problem of large long-term zero drift of polarization spectrum frequency stabilization is solved.

The invention discloses a methane gas sensor prepared by loading palladium with tin mud in a tin plating process and a preparation method of the methane gas sensor, and belongs to the technical fieldsof semiconductor gas sensors and environment monitoring. For solving the waste problem of tin mud produced in the tin plating process, a methane sensitive material is prepared by carrying out modification treatment such as washing, drilling holes and sintering on the tin mud and carrying out metal palladium loading on the basis. The prepared gas sensor shows higher sensitivity and better responseand recovery characteristics when detecting CH4 gas. The technology for preparing the material and the gas sensor adopted by the invention have the advantages of simple technology, low raw material cost, short preparation period and the like; the technology can be used for industrialized mass production. Meanwhile, comprehensive utilization of resources is realized in aspect of raw material resources. Therefore, the sensor has a broad application prospect in detection aspect of methane gas.

The invention provides a stress monitoring device. The stress monitoring device comprises a fiber bragg grating, an optical fiber and a strain body. A protective shell covering the sidewall is fixedly arranged on the sidewall of the strain body. A fiber outlet hole is formed in the protective shell. A protective baffle is arranged around the fiber outlet hole. In a layout space between the protective shell and the sidewall of the strain body, the first end of the optical fiber is fixed to the sidewall of the strain body, and the optical fiber is wound and fixed to the sidewall of the strain body according to a certain winding distance in the axial direction of the strain body. The fiber bragg grating is arranged on the optical fiber in the axial direction of the optical fiber. The second end of the optical fiber extends out of the protective shell through the fiber outlet hole and is connected with a wideband incident light source. A fiber bragg grating demodulation instrument is connected with the second end of the optical fiber through an optical coupler. The stress monitoring device can overcome the defects that an existing stress monitoring device is prone to electromagnetic interference, large in temperature excursion and poor in environmental adaptability. The invention further provides a manufacturing method.

The invention discloses a Pt1000 temperature transmitter with a wide power supply range. The Pt1000 temperature transmitter comprises a housing, wherein a circuit board is arranged in the housing; the circuit board comprises a main board and a bottom board which are vertically mounted; an input terminal and an output terminal are welded at left and right ends of the bottom plate respectively; three guide wires are introduced on the input terminal; the main board comprises an open circuit detecting and signal filter circuit, a main control CPU (central processing unit) and a reverse-connection-preventing circuit. According to the Pt1000 temperature transmitter disclosed by the invention, the relationship between the resistance and the temperature can be converted into the relationship between the voltage and the temperature after certain current is added, the reverse-connection-preventing circuit utilizes the one-way continuity of a diode, the safety of the circuit is guaranteed, and the wide power supply range is realized due to the reasonable model and design of elements and circuit.

The invention relates to an optical fiber hydrogen sensor based on Au@Pd nano particles and a preparation method thereof, and application of an optical fiber hydrogen sensor based on Au@Pd nano particles. The optical fiber hydrogen sensor comprises a flexible substrate and an Au@Pd nano particle single-layer film, wherein the surface of the flexible substrate is printed with a nano grating structure, and the Au@Pd nano particle single-layer film coveres the surface of the nano grating structure. The preparation method comprises the following steps of: (1) converting Au@Pd nano-particles into hydrophobic water, and dropping the hydrophobic water onto the surface of ultrapure water, inserting the flexible substrate into the liquid surface; (2) gathering Au@Pd nano particles on one surface area of the flexible substrate printed with the nano grating structure to a mirror surface with metallic luster, separating from the liquid surface at a speed of 0.1 mm/s after 10s, performing evaporating, and removing the flexible substrate. When the optical fiber hydrogen sensor is used for hydrogen detection, the response speed is high, the stability is good, and the response speed can reach 3s when the hydrogen concentration of 0.1% is measured.

The invention discloses a multi-mode coupling miniature electric field sensing device based on a piezoelectric effect and a piezoresistive effect. The miniature electric field sensing device comprisesa horizontally placed semiconductor thin film, a horizontally placed substrate is arranged under the semiconductor thin film, a cavity structure is formed between the semiconductor thin film and thesubstrate through support of a middle interlayer, an upper surface of the semiconductor thin film is evenly provided with a piezoresistive material, the piezoresistive material comprises a transverse-transverse mode piezoelectric film and a transverse-longitudinal mode piezoelectric block, and in a transverse-transverse mode, a top surface of the semiconductor thin film is provided with the piezoelectric film; and in a transverse-longitudinal mode, a bottom surface of the semiconductor thin film is provided with the piezoelectric block. The multi-mode coupling miniature electric field sensingdevice based on the piezoelectric effect and the piezoresistive effect, provided by the invention, has the beneficial effects of being small in volume and highly integrated, effectively reducing circuit temperature drift, reducing zero drift, improving measurement accuracy, being capable of realizing electric field accurate measurement under wide band, high field intensity and complex environment,and also being capable of being mounted and maintained in the case of being electrified.

The invention discloses a part weighing and counting method, which comprises the following steps: before and after parts are taken and placed, respectively weighing part storage boxes, comparing the weight difference of two times of weighing with the standard weight of the parts, and calculating the number of taken or placed parts; weighing the part storage box under the gravity center of the partstorage box each time. The influence of gravity center change of the part storage box on the weighing precision can be avoided, and the accuracy of the counting result can be improved.

The invention discloses a six-dimensional force measuring platform and a decoupling method thereof, and the method aims at the above typical problems of a six-dimensional force sensor, the measuring platform is processed into a whole through an integrated manufacturing technology, four three-dimensional force sensors are arranged in the measuring platform, and the output signals of the four three-dimensional force sensors are linearly added and subtracted. The three-dimensional force and three-dimensional torque measuring platform has the advantages that the decoupling method is simple, and the measuring precision is high; each three-dimensional force sensor adopts a Wheatstone full-bridge structure as a measurement circuit, so that the influence of temperature change on the measurement result of the sensor is effectively eliminated; the sensor manufactured through integrated machining is compact in structure, free of assembly stress and connection gaps, good in following performance and consistency of input signals, small in signal conversion loss and high in measurement precision.

The invention discloses a high-temperature solid ceramsite sand electric heating experiment device for supercritical carbon dioxide power generation. A high-power frequency modulation impact power supply provides power to the high-temperature solid ceramsite sand electric heating experiment device. In the high-temperature solid ceramsite sand electric heating experiment device, a variable frequency motor is fixed above a first channel steel fixing support, and a ceramsite storage device is fixed below the first channel steel fixing support. A first knife switch is fixed on the ceramsite storage device, and the other end of the first knife switch is connected with a positive electrode. A shaft of the variable-frequency motor is connected with a stirrer. Nine heating pipes are arranged in parallel between a pair of electrodes connected with an output end of the high-power frequency modulation impact power supply; a thermocouple arranged on a heating pipe; and the heating pipe and the electrodes are connected through a high-voltage crimping process. The other surface of a positive electrode plate is connected with the first knife switch; and the other surface of a negative electrode plate is connected with a second knife switch. And a ceramsite sand recoverer is positioned below the heating pipes, an upper part is welded with the second knife switch, and a lower part is welded with a third knife switch.

The invention provides an optical fiber temperature and vibration series integrated sensor based on a blazed grating and an optical fiber grating. The sensor is used for solving the problems that in the prior art, a temperature and vibration integrated sensor is large in zero drift, needs regular maintenance and calibration and is poor in sampling precision. The sensor comprises a shell and a cable, wherein the shell is internally provided with the optical fiber grating and a blazed grating vibration measuring structure; one end of the cable extends into the shell and leads out a path of optical fiber, the optical fiber grating is engraved on the upper portion of the path of optical fiber, and the blazed grating vibration measuring structure is connected with the tail end of optical fiber.The sensor is small in size, simple in structure assembly, small in zero drift, high in electromagnetic interference resistance, free of electric noise, high in measurement precision and high in connection reliability.

The invention is a kind of primary box for nano particle microscope, the box includes a high pressure amplifying model, a radiating and fan system, a primary model and a high/low voltage power system model, all of which are placed in the box independently, there has a radiating channel connected with the fan system around the primary model. The three models have relative independent electromagnetism masking structure. The functional templates are placed in the primary control model vertically in parallel. The electromagnetism masking performance is good, the irradiating effect is good, and the disturbance is small, the noise is small, the precision is higher than 0.5 nano. The whole volume is small.