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Preparation method of zirconium non- evaporable getter

A getter and non-evapotranspiration technology, which is applied in the field of getter preparation, can solve problems such as harsh use conditions, high activation temperature, and waste of energy, and achieve the effects of saving use costs, reducing activation temperature, and increasing the inhalation rate

Inactive Publication Date: 2019-01-18
南京恩瑞科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such as zirconium-aluminum 16 getters, zirconium graphite getters, zirconium-nickel getters, zirconium-iron-vanadium getters, etc. The most widely used are zirconium-based vanadium or aluminum-titanium getters. There are problems with this type of getters. The total amount of suction is not high, the activation temperature is high, the preparation is complicated, and the use conditions are harsh, which is very large for the resource consumption of the enterprise and wastes energy.

Method used

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  • Preparation method of zirconium non- evaporable getter

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Comparison scheme
Effect test

Embodiment 1

[0016] Embodiment 1: A kind of preparation method of zirconium type non-evaporable getter, comprises the following steps:

[0017] (1) choose the zirconium that is 75 parts by weight, the vanadium of 21 parts, the niobium of 25 parts and the iron of 11 parts as raw material, after mixing, it is standby;

[0018] (2) Put the mixed raw materials into the vacuum intermediate frequency melting furnace, start the vacuum system, and form a vacuum value of less than 3×10 -1 Pa vacuum environment;

[0019] (3) Under the vacuum condition of step (2), start the heating system of the vacuum intermediate frequency smelting furnace, raise the temperature to 1900° C. and melt the mixture in the furnace until the mixture is completely melted into a liquid state;

[0020] (4) cooling the liquid molten material into an alloy ingot, and then crushing the alloy ingot to 2cm alloy particles;

[0021] (5) Put the alloy particles into a vacuum ball mill to make a powder with a size of less than 1...

Embodiment 2

[0022] Embodiment 2: a kind of preparation method of zirconium type non-evaporable getter, comprises the following steps:

[0023] (1) choose the zirconium that is 60 parts by weight, the vanadium of 15 parts, the niobium of 4 parts and the iron of 3 parts as raw material, after mixing, it is standby;

[0024] (2) Put the mixed raw materials into the vacuum intermediate frequency melting furnace, start the vacuum system, and form a vacuum value of less than 3×10 -1 Pa vacuum environment;

[0025] (3) Under the vacuum condition of step (2), start the heating system of the vacuum intermediate frequency melting furnace, raise the temperature to 2100° C., and melt the mixture in the furnace until the mixture is completely melted into a liquid state;

[0026] (4) cooling the liquid molten material into an alloy ingot, and then crushing the alloy ingot to 3cm alloy particles;

[0027] (5) Put the alloy particles into a vacuum ball mill to make a powder with a size of less than 100...

Embodiment 3

[0028] Embodiment 3: a kind of preparation method of zirconium type non-evaporable getter, comprises the following steps:

[0029] (1) choose the zirconium that is 72 parts by weight, the vanadium of 0 part, the niobium of 20 parts and the iron of 8 parts as raw material, after mixing, it is standby;

[0030] (2) Put the mixed raw materials into the vacuum intermediate frequency melting furnace, start the vacuum system, and form a vacuum value of less than 3×10 -1 Pa vacuum environment;

[0031] (3) Under the vacuum condition of step (2), start the heating system of the vacuum intermediate frequency melting furnace, raise the temperature to 2000° C., and melt the mixture in the furnace until the mixture is completely melted into a liquid state;

[0032] (4) cooling the liquid molten material into an alloy ingot, and then crushing the alloy ingot to 2cm alloy particles;

[0033] (5) Put the alloy particles into a vacuum ball mill to make a powder with a size of less than 100 ...

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Abstract

The invention discloses a preparation method of a zirconium non- evaporable getter, comprising the following steps: (1) selecting 60-75 parts by weight of zirconium, 0-21 parts by weight of vanadium,4-25 parts by weight of bismuth and 3-11 parts by weight of iron as raw materials; (2) putting the mixed raw materials into a vacuum melting furnace to form a vacuum environment; (3) starting a heating system of the vacuum melting furnace, and melting the mixture in the furnace until the mixture is completed molten into a liquid state; (4) cooling the liquid melt into an alloy ingot, and crushingthe alloy ingot to alloy particles of 1-3 cm; (5) putting the alloy particles into a vacuum ball mill to make powder of 100 microns or less, and pressing the powder into a certain shape or into a carrier to form the getter. A formula and a preparation method of the existing non-evaporable getter are improved, so that the getting rate and the getting performance of a product are greatly improved, and meanwhile the activation temperature is lowered.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to a method for preparing a getter. Background technique [0002] Getter refers to the general term for preparations or devices that can effectively absorb certain (kinds) of gas molecules, and is used to obtain or maintain vacuum and purify gases. The getter has various forms such as powder, dish, ribbon, tube, ring, cup, etc. Getters are widely used in vacuum electronic devices, creating a good working environment for the device, stabilizing the characteristic parameters of the device, and having an important impact on the performance and service life of the device: increasing the vacuum degree of the vacuum device in a short time (up to 10 -4 Pa) to eliminate the residual and re-released gas after the device is exhausted and sealed off and during the aging process, which is beneficial to shorten the exhaust time; maintain a certain degree of vacuum during the storage and operat...

Claims

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Application Information

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IPC IPC(8): B01J20/02B01J20/30B01D53/02C22C16/00C22C1/02
CPCB01D53/02B01J20/02C22C1/02C22C16/00
Inventor 崔振东诸小春张小勇诸培星陈荣
Owner 南京恩瑞科技有限公司
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