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CVI process method for batch quick preparation of carbon/carbon composite crucible enclosure

A carbon composite material and process method technology, which is applied to the growth of polycrystalline materials, chemical instruments and methods, self-melting liquid pulling method, etc. shell effect

Active Publication Date: 2019-02-19
上海康碳复合材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this process has obvious disadvantages: preparation cycle, low deposition density, and a large number of pores inside

Method used

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  • CVI process method for batch quick preparation of carbon/carbon composite crucible enclosure
  • CVI process method for batch quick preparation of carbon/carbon composite crucible enclosure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0027] 1) Furnace loading (such as figure 1 is the schematic diagram of the induction furnace and prefabricated body tooling of the present invention), the needle-punched laminated crucible side prefabricated body is loaded in the high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone. There are several layers of support plates, and each support plate is supported and separated by graphite columns. The prefabricated body of the crucible side is placed on the support plate, and the prefabricated body of the large size of the crucible side is set with the prefabricated body of the small size of the crucible side; from top to bottom, the second The prefabricated body of the crucible side of the first layer and the prefabricated body of the t...

Embodiment 2

[0035] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0036] 1) Furnace loading, the acupuncture laminated crucible side prefabricated body is loaded in a high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone, and the constant temperature zone is provided with several layers of support plates from bottom to top, Each support plate is supported and separated by graphite pillars, the crucible side prefabricated body is placed on the support plate, and a large size crucible side prefabricated body is fitted with a small size crucible side prefabricated body; from top to bottom, the second layer The prefabricated body of the crucible side and the prefabricated body of the third layer of the crucible side are connected with a gas supply pipeline. There is one gas supply pipeline for each layer, a...

Embodiment 3

[0043] A kind of CVI process method of rapidly preparing carbon / carbon composite crucible sides in batches, comprising the following steps:

[0044] 1) Furnace loading, the acupuncture laminated crucible side prefabricated body is loaded in a high-temperature vapor deposition furnace, the upper part of the deposition furnace is a preheating zone, and the lower part is a constant temperature zone, and the constant temperature zone is provided with several layers of support plates from bottom to top, Each support plate is supported and separated by graphite pillars, the crucible side prefabricated body is placed on the support plate, and a large size crucible side prefabricated body is set with a small size crucible side prefabricated body; from top to bottom, the second layer of crucible side The prefabricated body, the prefabricated body of the third layer of the crucible side and the prefabricated body of the fourth layer of the crucible side are connected with an air supply p...

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Abstract

The invention discloses a CVI process method for batch quick preparation of a carbon / carbon composite crucible enclosure. By sleeving of crucible enclosure prefabs in different sizes, gas flowing arealimiting is realized; by reasonable setting of a fluid flowing route, the gas flows in a limited narrow area, and detention time of the gas in narrow slits is controlled. Narrow slit flowing has theadvantage that in a pyrolytic carbon deposition process, the prefab surface is less prone to crusting, and accordingly crucible enclosure prefabs can be deposited in high density in one time. When hydrocarbon gas flows through a first crucible enclosure prefab layer from top to bottom, splitting and pyrolytic carbon deposition reaction occurs in a high-temperature environment; when the gas reachesa second crucible enclosure prefab layer, precursors in a gas source are partially consumed, and the consumed precursors are offset by means of gas replenishing. By combination of sleeving and gas replenishing, efficiency in preparation of the carbon / carbon composite crucible enclosure can be greatly improved.

Description

technical field [0001] The invention relates to a CVI process method for rapidly preparing a carbon / carbon composite crucible side in batches. Background technique [0002] Currently, there are two main ways to prepare monocrystalline silicon: the Float zone method and the Czochralski method, and the monocrystalline silicon used in solar photovoltaic cells is prepared by the Czochralski method. The time node for photovoltaic grid parity is expected to come in 2020. The key to grid parity is to reduce production costs. It is a feasible way to increase the charging capacity of monocrystalline silicon Czochralski furnaces to reduce production costs, but graphite crucibles can no longer To meet the needs of monocrystalline silicon manufacturing enterprises, due to the low tensile strength and high brittleness of the graphite crucible side material, if it is made into an integral type, it will be difficult to process and relatively frequent replacement, resulting in high costs. T...

Claims

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Application Information

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IPC IPC(8): C04B35/83C04B35/622C30B15/10C30B29/06
CPCC04B35/622C04B35/83C04B2235/614C30B15/10C30B29/06
Inventor 邵忠贾林涛吴彪
Owner 上海康碳复合材料科技有限公司
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