A preparation method of wide-band uncooled infrared detector based on fbar

Abstract

A preparation method of an FBAR-based wide-band uncooled infrared detector relates to the field of infrared detection technology, which solves the problems of low absorption rate and limited wide-band absorption bandwidth of the infrared detector obtained by the preparation method, including the preparation of FBAR; Prepare a medium layer and a metal array layer; prepare a readout integrated circuit substrate; connect the readout integrated circuit substrate and FBAR; the metal array layer includes a plurality of metal units, and each metal unit is composed of at least three metal blocks of different sizes. The preparation method of the present invention has the advantages of integrated manufacturing, batch production, and low cost; by integrating the dielectric layer and the metal array layer on the surface of the FBAR, the enhanced absorption of the infrared spectrum by the uncooled infrared detector is realized, and broadband absorption is realized at the same time, and the production is simple And the infrared detector has excellent detection performance; the prepared detector not only has the advantages of traditional uncooled infrared detection, but also has fast response and high detection sensitivity.

Description

Technical field [0001] The invention relates to the technical field of infrared detection, in particular to a preparation method of a wide-band uncooled infrared detector based on FBAR. Background technique [0002] According to different working temperatures, infrared detectors are generally divided into two categories: refrigerated and uncooled. Cooled infrared detectors are usually made of semiconductor materials. Using the photoelectric effect of some materials, the photosensitive material absorbs photons, causing changes in electrical parameters. In order to suppress hot carriers and noise, the working temperature of refrigerated infrared detectors is usually below 77K. It needs to use a refrigerator or liquid nitrogen for refrigeration, which will result in a relatively large volume and weight, and a relatively expensive price. Uncooled infrared detectors are also called room temperature detectors, which can work at room temperature without cooling, so they have the adva...

AI Technical Summary

Problems solved by technology

At present, multi-layer structure absorption is usually used to increase the absorption bandwidth, and the absorption band of different layers is used to widen the absorption bandwidth of the absorption layer. Specifically, it includes: using different materials to prepare the absorption layer, but this method is limited by the stress of material preparation, and the range of material selection is limited. And increasing the thickness of the absorbing layer will affect the performance of the infrared detector; using a multi-layer micro-bridge structure, however, is limited by the difficulty of the process and the number of stacked layers is limited, so the absorption width is limited. In addition, this method greatly increases the process complexity and reduces the infrared detector. reliability

Images