The invention discloses a wide spectrum
infrared sensor based on piezoelectric effect and composite
plasmon, relates to the technical field of
infrared sensing, and solves the problems of low
absorption rate and limited wide-band
absorption bandwidth in the prior art; the wide spectrum
infrared sensor comprises a read-out
integrated circuit substrate, a micro-electromechanical
resonator, a
dielectric layer and a
metal array layer, and the read-out
integrated circuit substrate, the micro-electromechanical
resonator, the
dielectric layer and the
metal array layer are sequentially connected, wherein the
metal array layer comprises a plurality of metal units, and each metal unit comprises at least three metal blocks with different sizes. According to the uncooled infrared sensor, a medium layer and the metal array layer are integrated on the surface of the FBAR, so that the
enhanced absorption of the infrared spectrum by the uncooled infrared sensor is achieved, the
absorption rate is improved from 20% to more than 80%; meanwhile, the wide-band absorption is achieved, the manufacturing is simple and the sensing performance of the infrared sensor is excellent; the FBAR and the like areintegrated on the read-out
integrated circuit substrate, so that the integrated readout circuit can be integrally manufactured and produced in batch, and the cost is low; the sensor not only has the advantages of the traditional uncooled infrared sensor, but also has quick response and high sensing sensitivity.