Miniature throttling refrigerating machine based on micro-electro-mechanical system heating technology

A technology of throttling refrigerators and micro-electromechanical systems, which is applied in the direction of refrigerators, refrigeration components, refrigeration and liquefaction, etc., can solve the problems that impurity water molecules cannot be prevented from directly sublimating and depositing, so as to reduce irreversible heat transfer losses and reduce processing Difficulty, the effect of shortening the cooling time

Active Publication Date: 2019-04-05
TSINGHUA UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

Therefore, adding an ice crystal filter layer in the heat exchanger cannot prevent impurity water molecules from directly desublimat

Method used

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  • Miniature throttling refrigerating machine based on micro-electro-mechanical system heating technology
  • Miniature throttling refrigerating machine based on micro-electro-mechanical system heating technology
  • Miniature throttling refrigerating machine based on micro-electro-mechanical system heating technology

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Embodiment Construction

[0022] The present invention will be further described in detail in conjunction with the accompanying drawings, but this embodiment does not limit the present invention, and all similar structures and similar changes of the present invention should be included in the protection scope of the present invention.

[0023] figure 1 It is an exploded view of the structure of the miniature throttling refrigerator based on the micro-electromechanical system processing technology of the present invention. The refrigerator is welded into an integrated structure by successively stacking upper, middle and lower substrates (10, 20, 30). and the lower substrates (20, 30) jointly form a microchannel heat exchanger. see figure 2, (a), (b), and (c) are the schematic structural diagrams of each layer of substrates (10, 20, 30) respectively, and the corresponding positions at one end of each layer of substrates (10, 20, 30) are provided as working The through hole of the medium inlet 1 is pro...

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Abstract

The invention discloses a miniature throttling refrigerating machine based on a micro-electro-mechanical system heating technology, and belongs to the technical field of miniature throttling refrigerators. An upper-layer substrate piece, a middle-layer substrate piece and a lower-layer substrate piece are welded into an integrated structure, working medium inlets are all formed in the corresponding position of one end of each layer of substrate piece, and a working medium outlet is further formed in the upper-layer substrate piece; the middle part and the other end of the lower-layer substratepiece are provided with a first micro-channel and a buffer chamber correspondingly, the first micro-channel is an S-shaped groove, one end of the micro-channel communicates with the working medium inlet at one end of the lower-layer substrate piece, and the other end of the micro-channel communicates with one end of the buffer chamber; a second micro-channel and a strip-shaped through hole are sequentially formed in the middle-layer substrate piece, one end of the micro-channel communicates with the working medium outlet of the upper-layer substrate piece, and the other end of the micro-channel communicates with the buffer chamber through the strip-shaped through hole. According to the machine, the blocking problem in the miniature throttling refrigerating machine can be effectively relieved, the flow and heat exchange in the evaporation process can be further enhanced while the machining procedure is simplified.

Description

technical field [0001] The invention belongs to the technical field of micro-throttling refrigerators, in particular to micro-throttling refrigerators based on micro-electromechanical system processing technology. Background technique [0002] Micro-throttling refrigerator based on micro-electro-mechanical system processing technology is a refrigeration device with the advantages of no vibration, no electromagnetic interference, no moving parts, and perfect coupling with the cooled device. This type of miniature throttling refrigerator has received extensive attention in the cooling of low temperature electronic devices (the low temperature here refers to the temperature below 120K) and in the research of low temperature materials science, such as: low / high temperature for assembling fast digital circuits Superconductor electronics, low / high temperature superconductor quantum interferometers for detecting weak magnetic field signals, gallium arsenide-based electronics for si...

Claims

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Application Information

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IPC IPC(8): F25B9/00F25B39/02F25B41/00F25B41/06F25B41/30
CPCF25B9/002F25B39/02F25B41/00F25B41/30
Inventor 曹海山
Owner TSINGHUA UNIV
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