A mems driver based on protruding comb teeth and its working method

Abstract

The invention relates to a MEMS actuator based on extruded comb teeth and a working method thereof, and belongs to the field of micro-electro-mechanical system, MEMS actuator comprises a movable part,fixed combs, fixed anchor points and a basal layer. The movable part comprises radical trusses, arc trusses, movable combs and elastic beams, the fixed combs and the movable combs are distributed inan intersecting mode in pairs, and movable comb teeth and fixed comb teeth are all protruded comb teeth. According to the MEMS actuator based on the extruded comb teeth and the working method thereof,compared with the prior art, a protruded comb tooth structure is adopted, the front-rear width of the comb teeth is different, after voltage is applied, the comb teeth with narrow front ends are inserted into the space distances slightly wider than the comb teeth, and the space distances between the comb teeth are smaller; different static electricity actuators are correspondingly formed at the front ends and the rear ends of the comb teeth, namely in the same structural length, more comb teeth can be arranged and used for driving, all of the comb teeth facilitate to decrease the voltage, theMEMS actuator can be apply to an external cavity tunable laser device, an optical grating or a plane mirror can be installed on the MEMS actuator, or the side surface of the MEMS actuator can be madeinto the optical grating or the plane mirror, and no-mode-skip tuning of the laser machine is realized.

Description

technical field [0001] The invention relates to a MEMS device structure, in particular to a protruding comb-based MEMS driver and a working method thereof, which belong to the field of micro-electromechanical technology. Background technique [0002] Since the advent of lasers, tunable light sources have received great attention. Compared with other lasers, tunable lasers have outstanding advantages such as compact structure, large tuning range, narrow line width, large-scale production, and low price, and have shown more and more extensive application prospects in the scientific field. It has many applications in spectral analysis, laser ranging, industrial field process detection, atmospheric environmental pollution detection, medical diagnosis, optical communication and radar. The common tunable lasers on the market can be roughly divided into distributed Bragg reflective lasers, distributed feedback laser arrays, highly integrated distributed feedback laser arrays, and ...

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Problems solved by technology

[0004] In 2003, the external cavity tunable laser proposed by Ionon company used the design of the vertical MEMS mirror with in-plane movement to rotate around the imaginary axis point, which can realize wide-range mode-hop-free tuning, narrow linewidth, and high tuning speed, but In order to meet the wide range of mode-hop-free tuning, this design requires high voltage to drive the MEMS rotating mirror, which puts high requirements on the external drive circuit, which limits the application of the laser and is not conducive to the long-term use of the laser.

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