Method for manufacturing double-sided PERC high-efficiency crystalline silicon solar cell

Abstract

The invention discloses a method for manufacturing a double-sided PERC high-efficiency crystalline silicon solar cell. The method comprises the following steps of (1) texturing, (2) diffusion including crystalline silicon diffusion, (3) laser doping including the laser doping of a diffused crystalline silicon, (4) etching including the removal of diffused borophosphosilicate glass, (5) back passivation including the production of a SiO2-Al2O3-SiNx:H laminated passivation film with a thickness of 80-100 nm, (6) front side film coating including the generation of a SiO2-SiNx anti-reflection filmwith thickness of 80-90 nm by using the PECVD technology, (7) Backside laser doping and trenching including the formation of a corresponding P++ layer, wherein the line width of each of 120 laser doped region sub-gate lines is 40-45 micrometers, and composite 1.6 mm main grids are set, and (8) backside printing including the formation of a back aluminum grid pattern, the collection of current andsintering to form the double-sided PERC high-efficiency crystalline silicon solar energy battery.

Description

Technical field [0001] The invention relates to the technical field of solar cell production and manufacturing, in particular to a method for manufacturing a double-sided PERC high-efficiency crystalline silicon solar cell. Background technique [0002] Conventional fossil fuels are increasingly depleted, and people's attention has been focused on solar energy. Solar energy, as an inexhaustible form of energy, is gradually entering our daily lives. At present, silicon-based solar cells are the most used cells on the market, and their high-efficiency power generation efficiency and mature production technology make photovoltaic parity grid a reality. However, with the development of technology, PERC cells, that is, passive emitter back-contact solar cells, have received extensive attention. In the existing single-sided PERC cell, the aluminum paste is printed on the entire backside of the silicon wafer by printing, and the aluminum layer is entirely covered on the laser etching ...

AI Technical Summary

Problems solved by technology

In the existing single-sided PERC cells, the aluminum paste is printed on the entire back of the silicon wafer by printing, and the aluminum layer is completely covered on the laser etching line, and a local aluminum-silicon alloy layer is formed in the area of ​​the laser etching line. The place where the etched line is simply covered on the passivation film layer, because the all-aluminum back field is opaque, so the entire back cannot receive light to achieve back power generation, and only the front can absorb light energy to achieve single-side power generation, increasing the The production cost is low and the utilization rate of the produced battery is low, and the expected work efficiency cannot be achieved. In order to improve work efficiency, reduce production cost, save time and effort, and save energy, the present invention proposes a double-sided PERC high-efficiency crystalline silicon solar cell. method

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