Electron beam evaporation coating machine coating film correcting device

Abstract

The invention relates to an electron beam evaporation coating machine coating film correcting device which comprises a fixed correcting device I, a fixed correcting device II, a movable correcting device, one evaporation source, four halogen lamps, one ion source and one electronic gun. The one evaporation source, the four halogen lamps and the one ion source are on one same divided circle; the four halogen lamps are divided into two groups and are symmetrical along two sides of the center position; the evaporation source is located in the central symmetry position of a furnace body; the ion source is located on the left side of the furnace body; the electronic gun is located on the right side of the furnace body; the fixed correcting device I is located in the middle position between thetwo halogen lamps on the left side, and is arranged on the inner wall of the furnace body; the fixed correcting device II is located in the middle position between the halogen lamps on the right sideand the electronic gun, and is arranged on the inner wall of the furnace body; the installation heights of the fixed correcting device I and the fixed correcting device II are consistent; and the movable fixed correcting device is located on the right side of the furnace body and is located above the electronic gun. The electron beam evaporation coating machine coating film correcting device provided by the invention has the advantages of simple structure, less number of correcting devices, good effect and the like.

Description

technical field [0001] The invention relates to a coating correction device for an electron beam evaporation coating machine. Background technique [0002] The correction device of the existing coating machine usually adopts four fixed correction devices and one vertical movable correction device. The fixed correction method does not consider the influence of chamber pumping on the uniformity of the coating, and the vertical movable correction device must ensure the correctness of the correction plate and the evaporation source. It is often difficult to satisfy both the relative height and the vertical movement space structurally. Contents of the invention [0003] The calculation problem to be solved by the present invention is to provide a coating correction device for an electron beam evaporation coating machine with a simple structure, a small number of correction devices, good effect and a wider application range. [0004] The technical solution adopted by the presen...

AI Technical Summary

Problems solved by technology

[0002] The correction device of the existing coating machine usually adopts four fixed correction devices and one vertical movable correction device. The fixed correction method does not consider the influence of chamber pumping on the uniformity of the coating, and the vertical movable correction device must ensure the correctness of the correction plate and the evaporation source. It is often difficult to satisfy both the relative height and the vertical movement space structurally.

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