Electromagnetic driving galvanometer and driving magnetic circuit thereof

Abstract

The invention belongs to the field of micro-optical machine electricity, and specifically relates to an electromagnetic driving galvanometer and a driving magnetic circuit thereof. The driving magnetic circuit comprises a coil and an iron core. The iron core is shaped like a crab claw and comprises an iron yoke part and a stem part. The coil is wound on the stem part. The iron yoke part comprisesa first iron yoke part, a second iron yoke part and an open end, wherein the first iron yoke part, the second iron yoke part and the open end are integrally arranged in order. The first iron yoke partand the stem part are integrally arranged. The cross-sectional areas of the first iron yoke part, the second iron yoke part and the open end vary from large to small. The magnetic field of an electromagnet is concentrated on a permanent magnet to the greatest extent, which has the advantages of less energy loss and high energy utilization.

Description

Technical field

[0001] The invention belongs to the field of micro-opto-electromechanics, in particular an electromagnetic drive galvanometer and its drive magnetic circuit. Background technique

[0002] Compared with traditional beam deflecting components, MEMS galvanometer has the advantages of miniaturization, low energy consumption, fast response, easy integration, and long life. With the development of artificial intelligence and the demand for high precision, miniaturization and low cost of devices, MEMS Galvo mirrors shine in three-color laser projection, lidar, 3D measurement and other fields. Among them, electromagnetic drive has the advantages of linear response, large driving force, fast response speed, low driving voltage, and insensitivity to size. It is one of the most commonly used driving methods for micro galvanometers. Electromagnetically driven torsion mirrors can be divided into two types from the source of magnetic force: Lorentz force drive and electromagne...

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