Preparation method of polymer carbon film for anti-wear and anti-friction surface modification of fluororubber, and fluororubber obtained by using carbon film

A fluorine rubber, modified technology, applied in the field of fluorine rubber, can solve problems such as lackluster methods, achieve low friction coefficient, good wear resistance, and avoid heat damage

Active Publication Date: 2019-04-19
JIANGXI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the methods of anti-friction and anti-wear mo

Method used

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  • Preparation method of polymer carbon film for anti-wear and anti-friction surface modification of fluororubber, and fluororubber obtained by using carbon film
  • Preparation method of polymer carbon film for anti-wear and anti-friction surface modification of fluororubber, and fluororubber obtained by using carbon film
  • Preparation method of polymer carbon film for anti-wear and anti-friction surface modification of fluororubber, and fluororubber obtained by using carbon film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Fluorine rubber is used as the base material (thickness is 2mm), and the distance between the target and the base material is 9cm;

[0038] When the vacuum degree is higher than 2×10 －4 Pa, pass argon (Ar) in the deposition chamber, apply a DC bias voltage of 1000V to the substrate to generate Ar ions, and clean the substrate by sputtering for about 10 minutes;

[0039] CH 3 F, CH 4 Mix it with Ar in a ratio of 1:2:4 and pass it into the reaction chamber, and turn on the intermediate frequency DC sputtering power supply under the condition of 3.0Pa;

[0040] Control the sputtering power density of the target to 6W / cm 2 , and at the same time, under the action of self-bias, the charged ions are generated to bombard and sputter the high-purity graphite target to generate mixed plasma;

[0041]While sputtering the target, turn on the intermediate frequency pulsed DC bias power supply, control the voltage to 200V, and accelerate the mixed plasma generated above to reach...

Embodiment 2

[0045] Fluorine rubber is used as the base material (thickness is 2mm), and the distance between the target and the base material is 9cm;

[0046] When the vacuum degree is higher than 2×10 －4 Pa, pass argon (Ar) in the deposition chamber, apply a DC bias voltage of 1000V to the substrate to generate Ar ions, and clean the substrate by sputtering for about 10 minutes;

[0047] CH 3 F, CH 4 Mix with Ar in a ratio of 1:2:3 and pass it into the reaction chamber, and turn on the intermediate frequency DC sputtering power supply under the working pressure of 3.0Pa;

[0048] Control the sputtering power density of the target to 6W / cm 2 , and at the same time, under the action of self-bias, the charged ions are generated to bombard and sputter the high-purity graphite target to generate mixed plasma;

[0049] While sputtering the target, turn on the intermediate frequency pulsed DC bias power supply, control the voltage to 200V, accelerate the mixed plasma generated above to reac...

Embodiment 3

[0052] Fluorine rubber is used as the base material (thickness is 2mm), and the distance between the target and the base material is 9cm;

[0053] When the vacuum degree is higher than 2×10 －4 Pa, pass argon (Ar) in the deposition chamber, apply a DC bias voltage of 1000V to the substrate to generate Ar ions, and clean the substrate by sputtering for about 10 minutes;

[0054] CH 3 F, CH 4 Mix with Ar in a ratio of 1:2:5 and pass it into the reaction chamber, and turn on the intermediate frequency DC sputtering power supply under the condition of 3.0Pa;

[0055] Control the sputtering power density of the target to 6W / cm 2 , and at the same time, under the action of self-bias, the charged ions are generated to bombard and sputter the high-purity graphite target to generate mixed plasma;

[0056] While sputtering the target, turn on the intermediate frequency pulsed DC bias power supply, control the voltage to 200V, accelerate the mixed plasma generated above to reach the s...

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Abstract

The invention discloses a preparation method of a polymer carbon film for anti-wear and anti-friction surface modification of fluororubber, and a fluororubber prepared by using the carbon film. The method comprises the following steps: fluororubber used as a substrate, and undergoes sputter cleaning; a medium-frequency magnetron sputtering deposition technique is used to carry out bombard sputtering on a graphite target to produce mixed plasma; and a medium-frequency pulse direct-current bias power supply is turned on during sputtering of the target to accelerate the mixed plasma to the substrate and deposit on the fluororubber substrate. The polymer-like carbon film prepared by the method is uniform and compact, is closely combined with the fluororubber substrate, and can achieve a high bonding strength without depositing a transition layer. The fluororubber modified by the method has a low friction coefficient in a vacuum (being less than 10 to 3 Pa) environment and an atmospheric environment, and has good wear resistance. The surface modification method is used to make the fluororubber substrate keep the original chemical structure and properties.

Description

technical field [0001] The invention belongs to the technical field of surface modification of fluororubber, and in particular relates to a preparation method of a polymer-like carbon film applied to the anti-wear and anti-friction modification of the surface of fluororubber and the fluororubber prepared by using the carbon film. Background technique [0002] The outstanding high-elastic properties of rubber products make them occupy a place in the application field of sealing materials, especially fluororubber (FKM), which is famous for its oil resistance, high temperature resistance and corrosion resistance of various chemicals, is a high-tech application in modern military industry, aerospace and other high-tech industries. Indispensable material in the field. In the 21st century, with the continuous and rapid development of high-tech in our country, higher requirements are put forward for the performance of rubber products, especially rubber products working in a dynamic...

Claims

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Application Information

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IPC IPC(8): C08J7/00C23C14/02C23C14/12C23C14/35C08L27/12
CPCC08J7/00C08J2327/12C23C14/022C23C14/12C23C14/35
Inventor 刘小强
Owner JIANGXI UNIV OF SCI & TECH
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