Large-stroke high-speed and high-precision macro micro composite motion platform

Abstract

The invention provides a large-stroke high-speed and high-precision macro micro composite motion platform which comprises a base, an X-direction drive device, a Y-direction drive device, an X-direction moving assembly, a Y-direction moving assembly, a Z-direction telescoping device, a micro motion compensating unit, a macro micro displacement detecting device and an industrial control computer. The base, the X-direction drive device, the Y-direction drive device, the X-direction moving assembly, the Y-direction moving assembly and the Z-direction telescoping device form a macro motion mechanism. Under controlling of the industrial control computer, large-stroke macro motion of a terminal platform in the X, Y and Z directions can be achieved, operation of the platform is stable, and efficiency is high. The micro motion compensating unit forms a micro motion mechanism, under controlling of the industrial control computer, fine adjustment of motion of the terminal platform in the three-axis directions within the small range can be achieved, and the technical effects of three-dimension coordinating XYZ precise motion error compensation and three-axis vibration coordinating rapid restraining are achieved. According to the large-stroke high-speed and high-precision macro micro composite motion platform, large-stroke high-speed and high-precision stable motion of micro-electronic products can be achieved.

Description

technical field [0001] The invention relates to the field of microelectronics technology, and more specifically, relates to a large-stroke, high-speed, high-precision macro-micro composite motion platform. Background technique [0002] The high-quality and high-capacity manufacturing of microelectronic products depends on the combination of high-precision positioning and high-acceleration motion of key mechanisms. High-precision, high-acceleration motion and positioning can be achieved by combining macro and micro motions. However, The core issues such as the switching mechanism and behavior description of macro-micro composite high-speed motion and its subsystem motion, including digital description, vibration behavior, motion characteristics, and stability evaluation, have not been effectively resolved. The structural design of the high-speed precision motion platform, the design of the vibration suppression method and the determination of the control strategy have become ...

AI Technical Summary

Problems solved by technology

In addition, the actuator system generated by micro-nano motion involves coupling modeling of multiple physical fields such as electricity, magnetism, mechanism, and functional materials. The motion performance is restricted and affected by multiple fields and multiple factors. It is the physical nature and influence law of material properties, structural dimensions and composition on nonlinear hysteresis, creep and drift effects. The lack of related theories has always limited the accuracy of high-speed motion platforms.

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