Detection system for spectral resolution of Rowland grating spectrometer

A technology of spectral resolution and Roland grating, applied in the field of detection system of spectral resolution of Roland grating spectrometer, can solve the problems of Roland grating curvature radius deviation, the actual spectral resolution cannot reach the design index, the slit width does not match the design value, etc. , to achieve the effect of good stability, low operating cost and high flexibility

Active Publication Date: 2019-05-07
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, in the process of its development, due to the difference between the actual number of lines of the Roland grating and the number of theoretical lines of the Roland grating, the deviation of the radius of curvature of

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  • Detection system for spectral resolution of Rowland grating spectrometer
  • Detection system for spectral resolution of Rowland grating spectrometer
  • Detection system for spectral resolution of Rowland grating spectrometer

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[0045] Example

[0046] Take the radius of curvature R750mm; grating diameter Φ63.5mm; spectral order -1; reticle density 2400g / mm; incident angle 40°; entry arm 574.5mm; 10um slit to be measured Roland grating spectrometer as an example, combined figure 1 This embodiment will be described.

[0047] First use the laser to adjust the grating state to the test state, that is, the spectrum of each order is on the same horizontal plane, and the image of the emitted spectrum is parallel to the grating line direction, and the Roland system to be tested is adjusted according to the design parameters by adjusting the incident cantilever to adjust the incident narrow The front and back positions and incident angles of the slits are connected to a line spectrum light source such as a mercury lamp. From the incident angle of the Roland grating, the incident arm length, the grating line, the radius of curvature and other parameters, the connected line spectrum light source is calculated by the ...

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Abstract

The invention provides a detection system for a spectral resolution of a Rowland grating spectrometer. A light beam emitted by a light source is incident into an incident slit through an optical fiber. By adjusting the width of the incident slit, the angle of the light beam incident into the incident slit is changed. A light beam passing through the incident slit is incident into the Rowland grating, and gathered into the detector after splitting through the Rowland grating. By fine tuning the length and angle of an exit spiral arm, the spectral energy received by the detector is strongest andthe waveform is symmetrical. And by calculating the separation for receiving the spectral through the computer, the spectral resolution of the Rowland grating spectrometer is obtained. The detectionsystem for the spectral resolution of Rowland grating spectrometer provided by the invention has the advantages of being good in stability, accurate in analysis result, low in operation cost, and highin flexibility. Therefore the accurate measurement of the spectral resolution of the Rowland grating spectrometer can be realized.

Description

technical field [0001] The invention relates to the field of spectrum technology, in particular to a detection system for the spectral resolution of a Roland grating spectrometer. Background technique [0002] Spectral resolution is one of the core indicators of spectroscopic instruments and an important benchmark for evaluating the performance of spectroscopic instruments. Spectral resolution is the minimum wavelength difference that a spectrometer can separate, and it depends on factors such as the resolving power of the grating, the effective focal length of the system, the slit width, and the optical aberration of the system. [0003] For the Roland grating spectrometer, because of its high etendue and simple optical structure, it is widely used in metallurgy, casting, machinery, metal processing and other fields. However, in the process of its development, due to the difference between the actual number of lines of the Rowland grating and the number of theoretical line...

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Application Information

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IPC IPC(8): G01J3/28G01J3/20G01J3/10
Inventor 孙慈于昌本崔继承杨晋冯树龙宋楠李天骄
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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