Detection system for spectral resolution of Rowland grating spectrometer

A technology of spectral resolution and Roland grating, applied in the field of detection system of spectral resolution of Roland grating spectrometer, can solve the problems of Roland grating curvature radius deviation, the actual spectral resolution cannot reach the design index, the slit width does not match the design value, etc. , to achieve the effect of good stability, low operating cost and high flexibility

Active Publication Date: 2019-05-07
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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AI-Extracted Technical Summary

Problems solved by technology

However, in the process of its development, due to the difference between the actual number of lines of the Roland grating and the number of theoretical lines of the Roland grating, the deviation of the radius of curvature of...
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Method used

The detection system of a kind of Roland grating spectrometer spectral resolution that the present invention provides, the light beam that described light source is emitted enters described incident slit through described optical fiber incident, by adjusting the width of described incident slit to change light beam incident The angle of the incident slit, the light beam passing through the incident slit is incident on the Roland grating, after being split by the Roland grating, it is gathered to the detector, and by fine-tuning the length and angle of the outgoing spiral arm, The spectral energy received by the detector is the strongest an...
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Abstract

The invention provides a detection system for a spectral resolution of a Rowland grating spectrometer. A light beam emitted by a light source is incident into an incident slit through an optical fiber. By adjusting the width of the incident slit, the angle of the light beam incident into the incident slit is changed. A light beam passing through the incident slit is incident into the Rowland grating, and gathered into the detector after splitting through the Rowland grating. By fine tuning the length and angle of an exit spiral arm, the spectral energy received by the detector is strongest andthe waveform is symmetrical. And by calculating the separation for receiving the spectral through the computer, the spectral resolution of the Rowland grating spectrometer is obtained. The detectionsystem for the spectral resolution of Rowland grating spectrometer provided by the invention has the advantages of being good in stability, accurate in analysis result, low in operation cost, and highin flexibility. Therefore the accurate measurement of the spectral resolution of the Rowland grating spectrometer can be realized.

Application Domain

Technology Topic

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  • Detection system for spectral resolution of Rowland grating spectrometer
  • Detection system for spectral resolution of Rowland grating spectrometer
  • Detection system for spectral resolution of Rowland grating spectrometer

Examples

  • Experimental program(1)

Example Embodiment

[0045] Example
[0046] Take the radius of curvature R750mm; grating diameter Φ63.5mm; spectral order -1; reticle density 2400g/mm; incident angle 40°; entry arm 574.5mm; 10um slit to be measured Roland grating spectrometer as an example, combined figure 1 This embodiment will be described.
[0047] First use the laser to adjust the grating state to the test state, that is, the spectrum of each order is on the same horizontal plane, and the image of the emitted spectrum is parallel to the grating line direction, and the Roland system to be tested is adjusted according to the design parameters by adjusting the incident cantilever to adjust the incident narrow The front and back positions and incident angles of the slits are connected to a line spectrum light source such as a mercury lamp. From the incident angle of the Roland grating, the incident arm length, the grating line, the radius of curvature and other parameters, the connected line spectrum light source is calculated by the grating equation to be relatively similar The exit angle and position of the two spectra, and adjust the detector to this position, such as the theoretical value of 312.5674-313.1844nm. Fine-tune the length and angle of the outgoing cantilever, so that the received spectral energy is the strongest and the waveform is symmetrical. Choose an integration time of 150ms to get the shot Figure 5 The spectrum line shown, Figure 5 It is expressed as 312.5674(right)-313.1844nm(left) under the 10um slit, and further measured 312.5674(right)-313.1844nm(left) under the 10um slit, please refer to Image 6.
[0048] Figure 7 For the measured 313.1844nm spectrum, by Figure 7 It can be seen that at this time, the half-height width of the spectrum line is 2.35 pixels; Picture 8 For the measured 313.1555nm spectrum, by Picture 8 It can be seen that at this time, the half-height and width of the spectrum line is 2 pixels; Picture 9 For the measured 312.5674nm spectrum, by Picture 9 It can be seen that the FWHM of the spectral line is 2.75 pixels at this time; Picture 8 , Picture 9 It can be seen that the linear dispersion rate is 1.7684 mm/nm. By calculating the interval of the received spectrum, the spectral resolution of the measured Roland grating spectrometer system can be obtained. At 313.1844nm, the measured spectral resolution of the Roland grating spectrometer system is 0.011nm; at 313.1555nm, the measured spectral resolution of the Roland grating spectrometer system is 0.009nm; at 312.5674nm, the measured Roland grating The spectral resolution of the spectrometer system is 0.012nm.
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Description & Claims & Application Information

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