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Multilayer thin-film type temperature-sensitive thermo-responsive chip with high sensitivity and preparation method thereof

A heat-sensitive temperature and high-sensitivity technology, which is applied to thermometers, coatings, thermometers, etc. that are directly sensitive to heat-sensitive electric/magnetic components, can solve the problem that microcircuit miniaturization cannot be applied, and chips cannot achieve high-sensitivity measurement , slow chip response speed and other issues, to achieve the effect of miniaturization, resistance reduction, and small size

Active Publication Date: 2019-05-07
ZHAOQING EXSENSE ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional three-layer heat-sensitive temperature chip products often cannot achieve the purpose of low resistance and high B value while controlling the chip size due to the inherent resistivity and B value of the ceramic material itself, often low resistance The chip size of products with high B value will be very large, which cannot be used in some microcircuits and miniaturized production. At the same time, the excessively large chip size brings the disadvantage of slow response speed, which makes the chip unable to achieve high-sensitivity measurement.

Method used

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  • Multilayer thin-film type temperature-sensitive thermo-responsive chip with high sensitivity and preparation method thereof
  • Multilayer thin-film type temperature-sensitive thermo-responsive chip with high sensitivity and preparation method thereof
  • Multilayer thin-film type temperature-sensitive thermo-responsive chip with high sensitivity and preparation method thereof

Examples

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Effect test

Embodiment 1

[0054] In this example, N is selected as 6, and NTC heat-sensitive ceramic powder with a resistivity of 2000Ω·m at 25°C is prepared according to the existing conventional formula, and pressed and sintered into an ingot, and then the prepared ceramic ingot is used as a sputtering The target material of the ceramic film 20 uses silver as the target material of the sputtering metal film 4, and according to the preparation method of the present invention, the heat-sensitive temperature chip with a size of about 0.3 mm in length, 0.3 mm in width and 0.005 mm in thickness is produced, measured The resistance value of the heat-sensitive temperature chip at 25° C. is about 6 kΩ.

[0055] It can be seen that the heat-sensitive temperature chip described in the present invention can realize small size, low resistance value and high B value at the same time.

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Abstract

The invention relates to a multilayer thin-film type temperature-sensitive thermo-responsive chip with a high sensitivity. The temperature-sensitive thermo-responsive chip comprises a substrate, a ceramic body, and two metal end electrodes. The surface of the substrate is divided into a middle area and two end areas respectively arranged at two sides of the middle area. The ceramic body is arranged at the middle area. The two metal end electrodes are respectively arranged at the two end areas. The ceramic body is of a tortuous connected layered structure, which is formed by laminating N layersof ceramic films at intervals, wherein N is a natural number greater than or equal to 2. A metal film is arranged between each two adjacent ceramic films, and a metal film is arranged between the bottommost ceramic film and the substrate. Each metal film is only connected with one of the metal end electrodes. The invention further relates to a preparation method of the multilayer thin-film type temperature-sensitive thermo-responsive chip with the high sensitivity. According to the temperature-sensitive thermo-responsive chip, the small size, the low resistance value and the high B value canbe realized at the same time.

Description

technical field [0001] The invention relates to the technical field of electronic components, in particular to a multilayer film type high-sensitivity heat-sensitive temperature chip and a manufacturing method thereof. Background technique [0002] Such as figure 1 As shown, the traditional heat-sensitive temperature chip has a three-layer structure, including a porcelain body 1' and metal electrodes 2' respectively arranged on both surfaces of the porcelain body 1', and the metal electrodes 2' are usually silver electrodes. Such as figure 2 As shown, the preparation process of the traditional heat-sensitive temperature chip is: ceramic powder preparation → sintering ceramic ingots → slicing → printing metal electrodessintering metal electrodes. [0003] Traditional three-layer heat-sensitive temperature chip products often cannot achieve the purpose of low resistance and high B value while controlling the chip size due to the inherent resistivity and B value of the ce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/22C23C14/35C23C14/18C23C14/06C23C14/04
Inventor 贺晓东段兆祥杨俊唐黎民柏琪星
Owner ZHAOQING EXSENSE ELECTRONICS TECH
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