Preparation method of modulation grating for x-ray all-optical solid-state ultrafast detection chip and grating

Abstract

The invention belongs to the field of ultra-fast diagnosis, and provides a preparation method for an X-ray all-optical solid ultra-fast detection chip modulation grating and a grating. The problems are solved that the modulation grating prepared by a current process is thin in metal layer, it is difficult to prepare a grating with a high aspect ratio and it is difficult to achieve the blocking effect on the X ray. The method comprises the following steps of: the step 1, taking an epitaxial surface of an epitaxial wafer of an all-optical solid ultra-fast detection chip as a substrate of a grating material, and selecting an appropriate grating material, wherein the grating material can effectively absorb a metal material of X ray; the step 2, preparing a conductive metal module on the substrate to form a seed layer; the step 3, preparing an adhesive film on the seed layer, and employing an SU-8 adhesive for photolithography to form a glue grating structure; the step 4, performing micro-plating of the substrate with the glue grating structure to form a metal grating structure; and the step 5, removing the SU-8 adhesive to obtain a metal grating.

Description

technical field [0001] The invention belongs to the field of ultrafast diagnosis, and in particular relates to a preparation method of an X-ray all-optical solid ultrafast detection chip modulation grating and the grating prepared by the method, which are applied to ultrafast signal detection in the X-ray band. Background technique [0002] The all-optical solid-state ultrafast diagnostic technology has ultra-high time and space resolution, which refers to the use of ultrafast semiconductor chips to detect the corresponding signals to be tested to realize light-to-light conversion. When the signal light is incident on the ultrafast detection chip, an abnormal The balanced carriers are modulated by the grating structure on the surface of the chip, and the instantaneous refractive index spatial distribution pattern corresponding to the incident light is formed inside the detection chip, and the spatial distribution pattern corresponds to the grating structure, and then the sign...

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to solve the problem that the modulation grating prepared by the existing technology has a thin metal layer, it is difficult to prepare a high aspect ratio grating, and the X-ray blocking effect cannot be well realized, and a kind of X-ray all-optical solid superstructure is provided. Preparation method of fast detection chip modulation grating and the grating prepared by this method, applied to ultrafast signal detection in X-ray band

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