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Flexible bulk acoustic wave filter

A bulk acoustic wave filter, flexible technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as blanks in the development of flexible filters, achieve the effects of stable structure, increased adhesion, and improved overall performance

Pending Publication Date: 2019-06-14
TIANJIN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] BAW resonators on hard substrates and their extended filter applications have become mature in terms of commercialization, but there are few reports on related research with flexible characteristics, and there is still a gap in the development of flexible filters

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0045] Embodiment 1, flexible filter topology layout design

[0046] In this example, Figure 4 Shown is a schematic filter layout of a ladder topology comprising 2.5 resonant banks, the filter body comprising series resonators 400, 410, 420, parallel resonators 450, 470, port electrodes 440, 460, 480 and connecting strap 430. Among them, the parallel resonator and the series resonator are the basic resonators, the port electrodes are used to establish electrical connections with the external electrical system, and the connection strips are used to establish electrical connections between resonators and between resonators and port electrodes.

[0047] In this embodiment, the resonator pattern is not limited to quadrilateral, but also includes but not limited to general polygon, ellipse or special shape composed of multiple arcs and straight lines. The graphic design of the resonator should also satisfy: any two sides are not parallel to each other, and the internal angle in t...

Embodiment 2

[0048] Embodiment 2, the layout improvement of increasing the independent additional attachment area

[0049] In this embodiment, FIG. 5(a) shows a schematic diagram of a filter layout of a trapezoidal topology including 2.5 resonant groups. The main body of the filter includes series resonators 500, 510, 520, parallel resonators 550, 570, port electrodes 540, 560, 590, connecting strap 530 and independent additional attachment area 580. Among them, the parallel resonator and the series resonator are the basic resonators, the port electrodes are used to establish electrical connections with the external electrical system, and the connection strips are used to establish electrical connections between resonators and between resonators and port electrodes. The independent additional attachment area is neither electrically connected to the resonator nor electrically connected to the port electrode, which enhances the adhesion between the filter as a whole and the flexible substrat...

Embodiment 3

[0051] Example 3, layout improvement to increase the additional attachment area of ​​electrodes

[0052] In this embodiment, Fig. 6 shows a schematic partial layout of the filter, wherein Fig. 6(a) is the layout before improvement, and Fig. 6(b) is the layout after increasing the additional attachment area of ​​the electrode. The structure in Figure 6 includes port electrodes 600,601, connection strips 610,611 and resonators 620,621. In this embodiment, Fig. 6(a) is different from Fig. 6(b) in that the design of the port electrodes is different. The total area of ​​the port electrodes in Fig. 6(b) is larger than that of the port electrodes in Fig. 6(a), and has a better filter Adhesion between bulk and flexible substrates. Compared with a structure without additional electrode attachment area, the additional electrode attachment area can also enable the flexible filter and its surrounding structures to obtain a more uniform stress distribution during bending, thereby avoiding...

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PUM

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Abstract

The invention provides a flexible bulk acoustic wave filter, which comprises a flexible substrate, a plurality of resonators, a port electrode and a connecting band. The materials of the flexible substrate comprise but are not limited to polyterephthalic acid plastics, polyacetylenimine, polyethylene naphthalate, polyetherimide, metal or inorganic materials. The pattern of the resonator is polygonal, oval or special-shaped and is composed of a plurality of arc lines and straight lines, and the conditions that any two edges are not parallel to each other, the inner angle in the pattern is larger than or equal to 60 degrees, and the number of resonance groups of the series resonator and the parallel resonator is larger than or equal to 2 are met. The flexible bulk acoustic wave filter can beapplied to a transfer process to a flexible substrate, and has structural robustness after transfer. In the invention, the structure of the working area is stable by adding an edge constraint structure, and the adhesion capability of the filter on a flexible substrate is increased by adding an additional adhesion area.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a flexible bulk acoustic wave filter. Background technique [0002] Flexible electronics have developed rapidly in the fields of display, sensing, and communication, and wearable flexible electronic consumption has attracted more and more interest. Flexible electronics are generally considered to be electronics or electronic systems built on flexible substrates that can be bent, stretched, or twisted. Compared with conventional electronic systems on hard substrates, flexible electronics need to retain certain working ability under flexible deformation. Furthermore, in the application of high communication efficiency, building a flexible radio frequency system can further expand the field of flexible applications. [0003] As one of the important components of an RF system, filters play an important role in signal processing. The filter is a typical two-port electrical n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/58
Inventor 庞慰高传海张孟伦
Owner TIANJIN UNIV
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