Phosphorus source supply system suitable for tubular diffusion process

Abstract

The invention relates to the field of chemical equipment and in particular to a phosphorus source supply system suitable for a tubular diffusion process. The invention is achieved by the following technical solutions: the phosphorus source supply system suitable for the tubular diffusion process comprises a primary source bottle, and is characterized by further comprising a secondary source bottle, wherein the primary source bottle is in communication connection to the secondary source bottle through a connection pipeline, the primary source bottle is provided therein with a liquid level sensor for detecting the liquid level in the primary source bottle; and a main valve for controlling the on-off state of the connection pipeline. The object of the invention is to provide the phosphorus source supply system suitable for the tubular diffusion process. The primary and secondary source bottles are separated, the liquid level of the primary source bottle can be maintained at a reasonable set value, so that the phosphorus oxychloride steam for diffusion is stable and the diffusion quality is improved.

Description

technical field [0001] The invention relates to the field of chemical equipment, in particular to a phosphorus source supply system suitable for a tubular diffusion process. Background technique [0002] Photovoltaic technology is a new type of power generation system that uses the photovoltaic effect of solar cell semiconductor materials to directly convert solar radiation energy into electrical energy. Solar cells are an important basic component in the photovoltaic industry, and there is a diffusion process in the production process. In this process, a layer of phosphorus atoms needs to be deposited on the P-type silicon to form a PN junction, and a liquid source is often used for diffusion. The specific method of diffusion is to use an inert gas, such as nitrogen, to pass into a quartz source bottle filled with phosphorus oxychloride, and carry the phosphorus oxychloride vapor into the diffusion furnace tube. Phosphorus oxychloride reacts with oxygen to form elemental ...

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Problems solved by technology

This will cause the quality of the PN junction to change during the production process until unqualified products are produced.

[0004] In order to ensure the quality of the PN junction, phosphorus oxychloride usually needs to be replaced when the liquid level in the source bottle is 20mm in actual production, which will not only increase the consumption of phosphorus oxychloride in production, but also increase the workload of loading and unloading the source bottle. Pressure on the environment due to the inconvenient disposal of waste phosphorus oxychloride

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