B-site doped bismuth ferrite solid solution film as well as preparation method and application thereof
A technology for preparing bismuth ferrite and thin film, which is applied in the field of B-site doped bismuth ferrite solid solution thin film and its preparation, can solve the problems of substrate-free epitaxy, the surface cannot achieve no grain boundary and high flatness, and the like, Achieving the effect of good high-voltage electrical properties
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[0025] The invention provides a method for preparing a B-site-doped bismuth ferrite solid solution film, which is improved on the basis of the traditional film preparation method of bismuth ferrite sol-gel, and the method steps include:
[0026] S10, preparing a B-site doped bismuth ferrite solid solution sol;
[0027] S20, coating the bismuth ferrite solid solution sol in step S10 on the substrate to form a sol coating;
[0028] S30, heat-setting the sol coating;
[0029] S40, annealing the sol coating after the thermosetting treatment; wherein, during the annealing process, rapid heating and slow cooling are used to control the quality of the film;
[0030] S50, the substrate is peeled off to obtain the B-site doped bismuth ferrite solid solution thin film prepared in the present invention.
[0031] In the implementation of the above steps of the present invention, firstly, the piezoelectric enhancement effect of the quasi-isotype phase boundary is obtained by B-site dopin...
Embodiment 1
[0056] In this embodiment 1, the following detailed steps are adopted to prepare the film:
[0057] S11, according to 0.3mol / L 100mL(1-x)BiTi (1-y) / 2 Fe y Mg (1-y) / 2 o 3 -xCaTiO 3 (x=0.15, y=0.8) the amount of sol preparation calculation, use the following table to obtain raw materials:
[0058] Drug Name molecular weight Drug purity Experimental ratio stoichiometric number Weighing quality Bismuth nitrate (pentahydrate) 485.07 0.98 1.1 0.85 13.8839g Ferric nitrate (nonahydrate) 404.02 0.985 1 0.544 8.3675g Magnesium nitrate (hexahydrate) 256.41 0.99 1 0.085 0.6605g Calcium acetate (monohydrate) 176.18 0.99 1 0.15 0.8008g Titanium tetraisopropoxide 340.32 0.99 1 0.235 2.4235g Citric acid (monohydrate) 210.14 0.995 1 1 6.3359g Ethylene glycol monomethyl ether 76.09 >0.99 - - - propionic anhydride 130.14 >0.985 - - -
[0059] S12, dissolving Bi, Fe, Mg, and Ca salts in 50 ...
Embodiment 2
[0080] In this embodiment 2, the following detailed steps are adopted to prepare the film:
[0081] S10, according to (1-x)BiTi (1-y) / 2 Fe y Mg (1-y) / 2 o 3 -xCaTiO 3 (x=0.1, y=0.7) After calculating and obtaining the amounts of each material, a 0.3mol / L 100mL sol was prepared according to the steps in Example 2.
[0082] S21, select an LSMO substrate with a size of 5*5*1mm;
[0083] S22, cleaning the substrate in step S21 in an oxygen plasma cleaning machine for 90s;
[0084] S23, placing the substrate cleaned in step S22 on a coater, and then vacuuming and fixing the substrate;
[0085] S24, adding the sol prepared in step S10 onto the substrate by static dropwise addition;
[0086] S25, press the program start key of the glue homogenizer to start spin coating; the process of spin coating is set as:
[0087]
[0088]
[0089] S26, after the glue leveling process of the glue leveler stops, the vacuum is released, and the sample is removed.
[0090] S31, transfer...
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