Mask plate, netting device and netting method thereof

A technology of mask plate and frame, which is applied in the field of mask plate and its tensioning device, can solve the problem of lower precision of evaporation pixel position, improve the position accuracy of evaporation pixel, reduce the difference of deformation, and improve the accuracy Effect

Active Publication Date: 2022-05-13
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a mask plate and its stretching device and stretching method, and then solve the problem that the deformation of the frame at the vapor deposition temperature causes the position accuracy of the vapor deposition pixel to decrease, so as to improve the accuracy of the vapor deposition pixel. The purpose of positional accuracy

Method used

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  • Mask plate, netting device and netting method thereof
  • Mask plate, netting device and netting method thereof
  • Mask plate, netting device and netting method thereof

Examples

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no. 1 example

[0038] figure 1 It is a schematic structural diagram of a mask stretching device according to an embodiment of the present invention. Such as figure 1 As shown, the embodiment of the present invention provides a mask stretching device, the mask stretching device is used to prepare a mask 1, the mask 1 includes a frame 2 and a mask body arranged on the frame 2 3. The frame 2 is a rectangular frame with an opening in the middle. The mask body 3 is welded on the frame 2 and covers the opening on the frame 2 . The mask stretching device of this embodiment includes a deformation heating mechanism 4, a first force applying mechanism, and a stretching alignment mechanism 5. The deformation heating mechanism 4 is used to adjust the mask body 3 to be assembled and the frame 2 to be assembled. and keep the ambient temperature equal to the evaporation temperature, so that the mask body 3 is deformed, that is, the deformation heating mechanism 4 is used to simulate the evaporation tempe...

no. 2 example

[0048] image 3 It is a flowchart of a method for stretching a mask plate according to an embodiment of the present invention. Such as image 3 As shown, based on the technical concept of the foregoing embodiments, the present invention also provides a method for stretching a mask plate, including:

[0049] S1. Select the pressure CF exerted on the frame;

[0050] S2. Select the heating parameters of the deformation heating mechanism, so that the heating temperature of the deformation heating mechanism is consistent with the evaporation temperature of the actual evaporation detection;

[0051] S3, fixing the frame to be assembled;

[0052] S4. Applying the above-mentioned pressure CF to the frame;

[0053] S5, fixing the mask body to be assembled;

[0054] S6. FMM PPA adjustment; FMM PPA adjustment includes: performing the first mesh alignment on the mask body and the frame to be assembled, and completing the rough alignment of the mask body and the frame;

[0055] S7. T...

no. 3 example

[0071] Based on the technical idea of ​​the above-mentioned embodiments, the present invention also provides a mask made by the above-mentioned stretching method of the mask.

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Abstract

Embodiments of the present invention provide a mask plate, a net-stretching device, and a net-stretching method. The mask plate-stretching device includes: a deformation heating mechanism for adjusting the environment of the mask body to be assembled and the frame to be assembled temperature and keeping the ambient temperature equal to the evaporation temperature, so that the mask body is deformed; the first force applying mechanism is used to apply pressure to the frame, so that the frame generates a resisting force to offset the deformed The inner shrinking force exerted by the mask body on the frame; the net-stretching alignment mechanism is used to stretch and align the deformed mask body and the frame. In addition, the problem of reducing the positional accuracy of the vapor-deposited pixels due to the deformation of the frame at the vapor-deposition temperature is solved, and the purpose of improving the positional accuracy of the vapor-deposited pixels is achieved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate, a net stretching device and a net stretching method thereof. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display has been more and more widely used due to its advantages of high contrast, self-illumination and flexible display. At present, vacuum thermal evaporation is an effective method for preparing OLED devices. It deposits the material molecules heated and evaporated through the opening of the high-precision metal mask (FineMetal Mask, FMM) to the corresponding position of the backplane. . In this film forming method, the mask frame assembly (MFA) is a necessary item to ensure that the organic light-emitting material is accurately evaporated to the designed position. When performing MFA, it is necessary to ensure the pixel position accuracy of the pixel hole , PPA). [0003] The above-mentioned stretching ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/04
CPCC23C14/24C23C14/042
Inventor 马超黄世花张文畅曾望明
Owner BOE TECH GRP CO LTD
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