Three-degree-of-freedom decoupling ultra-precise large-stroke positioning and vibration excitation device

Abstract

The invention discloses a three-degree-of-freedom decoupling ultra-precise large-stroke positioning and vibration excitation device. The three-degree-of-freedom decoupling ultra-precise large-stroke positioning and vibration excitation device is characterized by comprising an upper loading plate and a lower mounting plate, wherein the upper loading plate and the lower mounting plate are connectedthrough a middle magnetic suspension loading part and three identical actuating elements around the magnetic suspension loading part; and each actuating element comprises a driver shell with an annular partition, and a giant magnetostrictive rod wrapped with an excitation coil is arranged in the driver shell. The three-degree-of-freedom precise positioning pointing function and the vibration excitation function are simultaneously considered, the plurality of functions can be realized through one set of system, the structure of the scheme is compact, the positioning pointing function is decoupled, and the micro-nano scale movement on the required translation degree of freedom can be independently realized; due to the fact that an embedded compliant amplifying mechanism is adopted, the positioning pointing stroke is enlarged, meanwhile, a magnetic suspension unloading device is designed, and can be used for carrying out unloading treatment on a large load during vibration excitation, sothat accurate loading of vibration interference can be realized.

Description

technical field [0001] The invention relates to a three-degree-of-freedom decoupling ultra-precision large-stroke positioning and vibration device, belonging to the technical field of ultra-precision positioning pointing and vibration excitation devices. Background technique [0002] The ultra-precise positioning device can make the target load move precisely according to the desired trajectory, and is widely used in genetic engineering, optical engineering, precision manufacturing and machining, aerospace and other fields. The vibration excitation device is used in the field of vibration testing to provide vibration disturbance for the vibration response test of mechanical parts. The traditional servo-driven three-degree-of-freedom positioning platform not only has a large structure size, but also has coupling, and is limited by the driving mechanism, so it is difficult to meet ultra-precision applications. Similarly, for the needs of micro-vibration testing, traditional el...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is: the size of the existing servo-driven three-degree-of-freedom positioning platform is huge, the motion accuracy is limited, and it is difficult to realize low-frequency and ultra-low-frequency micro-nano level vibration interference output and other problems

Images