Lever-type bidirectional surface acoustic wave acceleration sensor

Abstract

The invention discloses a lever-type bidirectional surface acoustic wave acceleration sensor. The lever-type bidirectional surface acoustic wave acceleration sensor comprises a metal shell, a movablebearing, a rigid lever, an inertia mass block, two pressure transmission rods and two surface acoustic wave sensor devices; the movable bearing is fixed in the center of the top surface of the metal shell; one end of the rigid lever is fixedly connected with the movable bearing, and the other end of the rigid lever is connected with the inertia mass block; the surface acoustic wave sensor devicesare both connected with the metal shell and are symmetric relative to the rigid lever; and one end of each pressure transmitting rod is vertically and fixedly connected with the rigid lever, and the other end of each pressure transmitting rod contacts with the corresponding surface acoustic wave sensor device. With the sensor disclosed by the invention adopted, defects such as the poor structuralstability, short service life, axial deformation of a cantilever beam are avoided; a force to be tested is increased according to a lever principle, and therefore, the structure sensitivity of the sensor is high, the detection threshold value of the sensor is low; and an acceleration direction can be detected. The sensor is convenient to install, high in detection precision, and has a bright application prospect.

Description

technical field [0001] The invention belongs to the technical field of sensors, relates to a surface acoustic wave sensor in the acoustic technology, in particular to a wireless passive bidirectional surface acoustic wave acceleration sensor with a lever structure. Background technique [0002] Acceleration sensors are mainly used to test the acceleration of objects. Generally, acceleration sensors mainly have piezoresistive, capacitive and piezoelectric structures. [0003] The piezoresistive acceleration sensor characterizes the acceleration by measuring the deformation of the pressure-sensitive element (pressure-sensitive metal, ceramic, silicon crystal, etc.) under the action of inertial force. When the piezoresistive element is affected by the inertial force, the resistivity of the piezoresistive element changes, and the magnitude of the induced acceleration can be determined according to the change in the resistance value of the piezoresistive element. However, due to...

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Problems solved by technology

[0008] The purpose of the present invention is to overcome the defects of poor stability, short service life, poor detection accuracy and inability to judge the direction of the prior art, and provide a lever-type bidirectional surface acoustic wave acceleration sensor with high detection accuracy, good stability and long service life

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