Synchronous motion control system and method for high-precision and high-speed motion table based on open VPX

A high-speed motion, synchronous motion technology, applied in general control systems, control/regulation systems, program control, etc., can solve problems such as limited transmission rate, electrical connection restrictions, inability to meet data transmission rate, etc., to facilitate maintenance and debugging, The effect of increasing bandwidth and improving data interaction servo performance

Active Publication Date: 2021-06-08
GUILIN UNIV OF ELECTRONIC TECH
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  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Although the VPX bus is compatible with a variety of high-speed serial data buses, it is limited by the electrical connection and the transmission rate is limited. 4×Serial can reach up to 10Gbps, which cannot meet the needs of continuously increasing data transmission rates.

Method used

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  • Synchronous motion control system and method for high-precision and high-speed motion table based on open VPX
  • Synchronous motion control system and method for high-precision and high-speed motion table based on open VPX
  • Synchronous motion control system and method for high-precision and high-speed motion table based on open VPX

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Embodiment Construction

[0069] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0070] It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of component...

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Abstract

The present invention proposes a high-precision high-speed motion platform synchronous motion control system based on Open VPX, including a system control card, a motion control card, a data acquisition control card, a grating signal processing card, a multi-channel digital-to-analog conversion controller, and the environment information of the motion platform Acquisition card, motor driver, eddy current acquisition board, sensor information acquisition board, grating ruler reading head and host computer. The present invention adopts Open VPX to support the VITA66.4 optical interconnection backplane bus protocol, the optical fiber connector adopted supports multi-channel optical fiber interconnection, the data transmission rate of a single channel can reach 14Gbps, and the optical interconnection backplane bus is used for data transmission. It can meet the high servo frequency, large data volume and high real-time requirements of the high-end lithography machine motion table synchronization control system.

Description

technical field [0001] The invention relates to a motion control system for precision mechanical equipment such as semiconductors, in particular to an Open VPX-based high-precision and high-speed motion platform synchronous motion control system. Background technique [0002] The motion table control system of the lithography machine is an important part of the lithography machine of the semiconductor chip manufacturing equipment. The effect directly affects the overlay accuracy of the lithography machine. Since the synchronous motion control system requires multiple subsystems to work together, the industrial control bus is used to organically connect the subsystems and make them work in an orderly manner to achieve the desired synchronous motion effect. [0003] In the past, lithography machine manufacturers and some research institutions at home and abroad mostly used the VME bus as the backplane bus of the synchronous motion control system. With continuous improvement,...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/414
CPCG05B19/4142G05B2219/34013
Inventor 熊显名张文涛周航汛杜浩张丽娟
Owner GUILIN UNIV OF ELECTRONIC TECH
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