34results about How to "Improve servo performance" patented technology

A lithographic apparatus comprising a control system, such as a motion control system, is presented. The control system includes an actuator for effecting a movement of a moveable part and a feed-forward path from a setpoint input of the control system to the actuator. The control system further includes a feed-back loop, a feed-forward transfer function of the feed-forward path having a feed-forward transfer function part which is an inverse of a part of the actuator transfer function having a stable inverse, the actuator transfer function including a part having a stable inverse and a remainder potentially having an unstable inverse. The setpoint path includes a setpoint delay function, and the feed-forward transfer function further includes a second feed-forward transfer function part. A difference in delay between the setpoint delay function and the second feed-forward transfer function part is equal to a delay of the potentially unstable remainder of the actuator transfer function. Further, a method is described to find an optimal feed-forward controller directly on the basis of measured data.

The invention provides a permanent magnet fault-tolerant motor drive controller for thrust vector control. The controller includes a digital controller composed of a DSP and an FPGA, an isolated drivecircuit, a fault-tolerant power driver and a signal processing circuit. According to the drive controller, a Hall current sensor is used to collect the phase winding current of a motor, the positionand rotating speed signals of a motor rotor are collected through a rotary transformer, after the signals are processed by the signal processing circuit and are subjected to analog-to-digital conversion, digital signals representing a phase winding current value, a rotor position and a rotating speed are sent to the digital controller, the digital controller estimates the rotor position and the rotation speed of the motor in real time through a sensorless control method based on non-orthogonal two-phase winding high-frequency injection according to a non-fault two-phase winding current signalof the motor, which is in mutual dissimilarity redundancy with motor rotor position and speed signals obtained by a mechanical sensor, and the reliability of the motor position detection is improved.The controller has good fault isolation ability and fault-tolerant running performance and high power density, and the drive control requirements of high reliability, high power density, and high servo performance of a thrust vector control system in the aerospace field can be effectively satisfied.

A stop device for a robot for stopping the relative motion of a pair of mutually movable parts, having a stopper member provided at least one of the pair of mutually movable parts, the stopper member being sandwiched between the pair of mutually movable parts when the pair of mutually movable parts collide with the stopper member, wherein the stopper member is a combination member composed of at least two members of different hardness adhered to each other, such that opposite end faces of one member of highest hardness of at least two members, are adapted respectively to come into direct contact with the pair of mutually movable parts and to receive a compression load exerted between the pair of mutually movable parts at a time of collision in a generally perpendicular direction to the end faces.

A machine learning device that performs machine learning with respect to a changing unit configured to change a parameter of a control unit configured to control a servo motor and a compensation value of at least one of a position command and a torque command includes: a state information acquisition unit configured to acquire state information including the position command, a positional error, a combination of the parameter and the compensation value; an action information output unit configured to output action information including adjustment information of the combination of the parameter and the compensation value included in the state information; a reward output unit configured to output a reward value of reinforcement learning based on the positional error included in the state information; and a value function updating unit configured to update a value function based on the value of the reward, the state information, and the action information.

An apparatus is disclosed for enhancing the operational performance of a servo. The apparatus comprises an auxiliary shaft that is independent and displaced from the servo and an actuation sensor that is operably coupled to the auxiliary shaft. The auxiliary shaft is configured to be driven by a motor associated with the servo.

A manufacturing method of a tape-form recoding medium in the present invention is configured with a raw web winding process of winding on a winding core raw web having a support body, a data recoding layer laminated on one side of the support body, and a minute convexity laminated on the other side thereof; a raw web rewinding process of rewinding on other winding cores the raw web wound on the winding core in the raw web winding core; and a heat treatment process of heating the rewound raw web and decreasing a number of a concavity not less than 30 nm in depth formed in the data recording layer in the raw web winding process to not more than 80 pieces/mm².

The invention discloses an electromechanical static-pressure actuating system. The electromechanical static-pressure actuating system comprises a servo motor, a hydraulic variable pump, a first valvebank and a hydraulic cylinder. The servo motor is connected with the hydraulic variable pump through a coupling assembly. The hydraulic variable pump is connected with the hydraulic cylinder through the first valve bank. The first valve bank comprises two high-pressure pre-tightening branches. Each high-pressure pre-tightening branch comprises a first energy accumulator and a first valve. Each first energy accumulator is used for maintaining the oil pressure of the corresponding high-pressure pre-tightening branch, and each first valve is used for controlling the corresponding high-pressure pre-tightening branch to be on and off. The hydraulic variable pump is driven through the servo motor. By means of the first valve bank, two cavities of the hydraulic cylinder are in the controllable state. According to the electromechanical static-pressure actuating system, by means of the first valve bank, the high-pressure environment is provided for an oil inlet pipe and an oil return pipe of the hydraulic variable pump, so that the two oil cavities of the hydraulic cylinder are in the controllable state; the inherent frequency of the electromechanical static-pressure actuating system can beremarkably increased; and the dynamic property of the electromechanical static-pressure actuating system can be improved.

In a servo controller and an optical disk device (FIG. 4), the following performance for disturbance is improved. By disposing a characteristic change section to change a characteristic to improve the following performance for disturbance, the disturbance is detected by use of a signal in a stage after the characteristic change section.

The invention provides a ground connecting wall flexible impervious body construction method and a structure thereof. A composite soil impervious body surrounds a joint seam position between two adjacent ground connecting walls in the structure, a guide wall at the joint seam position of the ground connecting wall is directly formed in the composite soil impervious body after the composite soil impervious body is formed; a construction method of the structure comprises: staking out in survey, i.e., determining the joint seam position of the ground connecting wall according to a standard of the ground connecting wall; forming mutually occluded composite soil piles along a thickness direction of the wall at the position to form a flexible composite soil impervious body; after construction of the composite soil impervious body is finished, constructing the guide wall and then constructing the grounding connecting wall. The ground connecting wall flexible impervious body construction method and the structure thereof have the beneficial effects that the flexible composite soil impervious body is firstly constructed, the guide wall is arranged on the flexible composite soil impervious body, the underground ground connecting wall is then constructed in the composite soil impervious body, and since the deformation of the composite soil impervious body and the ground connecting wall have well servo property, the problem of leakage of a joint seam of the current ground connecting wall is solved.

The invention discloses an optical early warning tracking platform based on a fast reflector array and a working method.The tracking platform is provided with three layers of fast reflector fixing frames, each layer of fast reflector fixing frame is provided with five fast reflectors, and each fast reflector is independently driven by a motor; each fast reflector is connected with an optical imaging system, the the optical imaging system controls the motor. The device can realize 360-degree all-dimensional target rapid search, can continuously track and identify a plurality of moving targets in a view field in real time, and effectively solves the problem that the view field and the operating distance cannot be optimized at the same time; The servo capability of target tracking is greatly improved, the task efficiency of a single device is close to or reaches the efficiency after networking of a plurality of traditional photoelectric early warning devices, and the number of personnel and equipment is greatly reduced.