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Optically addressed, thermionic electron beam device

An electron beam and electron beam source technology, which is applied in the field of optical addressing and thermal electron beam devices, can solve the problems of large electron beam source, large amount of energy, and expensive manufacturing.

Active Publication Date: 2021-10-29
THE UNIV OF BRITISH COLUMBIA +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditionally, electron beam sources utilizing thermionic cathodes are large, expensive to manufacture, require large amounts of energy to generate electron beams, and typically have internal pressures in a high vacuum state, i.e., 10 -6 Torr or lower

Method used

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  • Optically addressed, thermionic electron beam device
  • Optically addressed, thermionic electron beam device
  • Optically addressed, thermionic electron beam device

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Embodiment Construction

[0014] Typically, the present disclosure provides a compact electron beam (electron beam) source that utilizes a small amount of input power and is efficiently manufactured relative to the conventional electron beam source. The disclosed electron beam source can be an independent module that can easily bind or replace within the apparatus using the electron beam. The present disclosure also provides a scanning electron microscope (SEM) using the disclosed electron beam source.

[0015] The electron beam source of the present disclosure utilizes a cathode, the cathode comprising a low-dimensional conductive material having an anisotropic limitation, which can be optically heated to thermally electronically produce free electrons.

[0016] "Low-dimensional" refers to a material in which electrical and thermal behavior is different from block materials, and can be approximated by less than three-dimensional. For example, the low-dimensional material may be "substantially one-dimensio...

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Abstract

Provided is an electron beam source comprising a container forming a chamber, a cathode disposed in the chamber, an electrode disposed in the chamber, and an electron emission window in the chamber, the cathode comprising A low-dimensional conductive material for the electrodes connectable to a power source for applying a positive voltage to the electrodes relative to the cathode for accelerating the departure of free electrons when the cathode is irradiated with electromagnetic (EM) radiation such that the cathode thermtronically emits free electrons The cathode forms the electron beam, and the electron emission window in the chamber is used to pass the generated electron beam out of the chamber. An electron microscope comprising an electron beam source is also provided.

Description

Technical field [0001] The present disclosure generally relates to means for generating electron beams for optical addressing, thermally electronically. Background technique [0002] Electron beam (electron beam) is used in many applications, including electron microscopy, photolithography, welding, photocouplers / converters, and display screens. Traditionally, the electron beam of the thermal electron cathode is large, the manufacturing is expensive, and a large amount of energy is required to generate an electron beam, and is usually in the high vacuum state, which is 10. -6 Torr or less. [0003] Therefore, it is desirable to provide a compact, low cost, low-power electron beam source that can be used in various applications. Inventive content [0004] According to one aspect of the present disclosure, an electron beam is provided comprising a container forming a chamber, a cathode disposed within a chamber, an electrode disposed in a chamber, the cathode comprising an aniso...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J33/00H01J37/20H01J37/28H01J37/29H01J33/02H01J33/04H01J37/075
CPCH01J33/04H01J37/075H01J37/28H01J3/024H01J2237/164H01J2237/06333H01J2329/0455H01J2201/30469H01J1/34H01J29/48H01J35/14
Inventor A·诺杰M·H·C·常K·德里迪G·A·萨瓦兹奇R·L·保罗R·F·W·皮斯
Owner THE UNIV OF BRITISH COLUMBIA