Frequency tracking circuit of CMUT resonant biochemical sensor

A biochemical sensor, frequency tracking technology, applied in frequency measurement devices, electrical components, impedance networks, etc., can solve problems such as normal operation, small vibration amplitude, and difficulty in resonance, and achieve the effect of reducing operating voltage and power consumption.
CN110221123AActive Publication Date: 2019-09-10XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2019-09-10

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Abstract

The invention discloses a frequency tracking circuit of a CMUT resonant biochemical sensor, and the circuit comprises a bias network, an impedance matching network, a CMUTs network, a load capacitancenetwork and a BJT amplification feedback network, wherein the bias network provides DC voltage for the CMUTs and avoids current overload; the impedance matching network tunes to make the CMUTs form aseries-parallel resonant region; and positive feedback of an oscillating signal is formed based on the BJT and the load capacitance network to realize real-time output of the oscillating signal of the CMUTs parallel resonance point. The frequency tracking circuit provided by the invention enables the CMUTs to form a series-parallel resonant region at a low voltage, and the resonant circuit is simple and convenient, the starting time is microsecond, and the CMUTs resonant frequency can be output in real time, which is of great significance for portable and real-time detection applications based on CMUTs resonant biochemical sensors.
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Description

technical field

[0001] The invention belongs to the technical field of MEMS sensor electronic measurement, and in particular relates to a frequency tracking circuit of a CMUTs (Capacitive Micromachined Ultrasonic Transducers, capacitive micromachined ultrasonic transducer) resonant biochemical sensor. Background technique

[0002] In recent years, CMUTs have been applied in the field of resonant biochemical substance detection, which has the characteristics of high quality factor. After coating with functional materials, the detection sensitivity of CMUTs resonant biochemical sensors can reach ppt level. The cell size of CMUTs based on MEMS technology is only tens of μm, and large-scale arrays can be realized. Designing a frequency tracking circuit for real-time output is the key to the real-time monitoring application of CMUTs resonant biochemical sensors.

[0003] Foreign research institutions have carried out some research on CMUTs frequency tracking circuit, but there is...

Claims

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