High-stability zero-rigidity micro-vibration isolation device based on magneto-rheological technology

Abstract

The invention discloses a high-stability zero-rigidity micro-vibration isolation device based on a magneto-rheological technology. The vibration isolation device comprises a horizontal vibration isolation supporting frame and a vertical vibration isolation mechanism, wherein the vertical vibration isolation mechanism is fixed on a horizontal vibration isolation table of the horizontal vibration isolation support frame, a workbench is arranged over the vertical vibration isolation mechanism and is connected with the vertical vibration isolation mechanism through a screw rod, and magneto-rheological fluid is poured into the positions below the horizontal vibration isolation table of the horizontal vibration isolation platform, in the center of the vertical vibration isolation mechanism, andin a center circular ring of the vertical vibration isolation structure below the workbench, so that liquid damping is changed by changing the current intensity. According to the vibration isolation device, an ultra-low horizontal and vertical direction inherent frequency is achieved, a good vibration isolation effect is achieved, the contradiction between high bearing capability and low inherentfrequency is well solved, the whole mechanism has the characteristics of high stability and zero rigidity, the extremely low vibration transmission rate is achieved, and the vibration isolation devicehas the advantages of being small in size, simple and compact in structure, stable in performance and the like.

Description

technical field [0001] The invention relates to an ultra-precise vibration isolation technology, in particular to a high-stability zero-stiffness micro-vibration isolation device based on magnetorheological technology. Background technique [0002] With the development of science and technology, ultra-precision processing and measuring equipment represented by lithography machines, precision machine tools, and atomic force microscopes have achieved higher and higher precision, and their applications have become more and more extensive. The required measurement and processing environments have become more and more Therefore, the demand for low-frequency ultra-precision vibration isolation equipment or devices is also increasing. The low-frequency ultra-precision high-stability zero-stiffness micro-vibration isolation device can well isolate the low-frequency micro-vibration of the surrounding environment, achieve the purpose of vibration isolation, and provide an ideal workin...

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Problems solved by technology

[0004] Chinese patent (application number: 201110248147.9) is an ultra-low frequency precision active shock absorber, which consists of a negative stiffness structure and an air spring in parallel to form a passive shock absorber unit, and a Lorentz linear actuator to form an active shock absorber unit, which can effectively isolate ultra-low frequency Low-frequency vibration, but more parts are required, the structure is relatively complex, and the requirements for machining accuracy are relatively high

However, the high cost of active control and the maintenance of sensors cannot be avoided

[0006] In short, although the above-mentioned public documents can achieve the purpose of vibration isolation, they are not ideal in terms of space requirements, service life and maintenance.

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