Batch-efficient monolithic fabrication of terahertz hollow-core rectangular waveguides

A technology of a rectangular waveguide and a manufacturing method, which is applied in the field of precision manufacturing of waveguide micro-devices, can solve problems such as unusable processing methods, and achieve the effects of good quality, strong process adaptability and high efficiency

Active Publication Date: 2021-03-09
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] As the operating frequency continues to increase, the size of the end face of the rectangular waveguide decreases accordingly, and the requirements for the processing fillet radius and surface roughness are also getting higher and higher, which makes some existing processing methods unusable, and other technologies must be developed

Method used

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  • Batch-efficient monolithic fabrication of terahertz hollow-core rectangular waveguides
  • Batch-efficient monolithic fabrication of terahertz hollow-core rectangular waveguides
  • Batch-efficient monolithic fabrication of terahertz hollow-core rectangular waveguides

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Experimental program
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Embodiment Construction

[0041] The waveguide to be prepared is as Figure 9 As shown, the following preparation process is used:

[0042] Step 1: Prepare a sacrificial mandrel composed of a low melting point alloy by photolithography;

[0043] Step 1.1: coating a layer of photoresist 2 with a thickness of H1 on the substrate 1;

[0044] Step 1.2: Place the substrate 1 coated with photoresist in step 1.1 on the stage of the photolithography machine, and use the mask plate 3 to expose;

[0045] Step 1.3: put the exposed substrate 1 in step 1.2 into a developing solution for development, wash and dry after the development;

[0046] Step 1.4: Place the substrate 1 developed in step 1.3 on a heating plate, and set the temperature to a temperature higher than the melting point of the low melting point alloy, and evenly fill the molten low melting point alloy into the concave formed in step 1.3 in the slot;

[0047] Step 1.5: Precisely polish the surface of the low-melting-point alloy 4 after cooling an...

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Abstract

The invention relates to a batch-efficient overall manufacturing method of a terahertz hollow-core rectangular waveguide, belonging to the field of precision manufacturing of waveguide micro-devices, comprising the following steps: step 1: preparing a sacrificial core mold composed of a low-melting point alloy; step 2: preparing a sacrificial core mold The upper surface of the mold is electroplated with gold to obtain the first layer of electroplated gold layer; step 3: remove the one-side gold-plated body of the sacrificial core mold from the substrate; step 4: obtain the second layer of electroplated gold layer on the surface of the one-side gold-plated body of the sacrificial mandrel Step 5: Electroform copper on the surface of the electroformed gold layer to obtain the electroformed copper layer; Step 6: Carry out precision polishing to the surface of the electroformed copper layer to obtain the required size; Step 7: Remove the low-melting point alloy to obtain too Hertzian air-core rectangular waveguide. The processing method can realize mass production of sacrificial core molds with high precision, and the sacrificial core molds can be removed efficiently and conveniently by means of heating, so that the terahertz hollow-core rectangular waveguides can be manufactured efficiently in batches.

Description

technical field [0001] The invention relates to a mass-efficient overall manufacturing method of a terahertz hollow-core rectangular waveguide, which belongs to the field of precision manufacturing of waveguide micro-devices. Background technique [0002] Terahertz waves generally refer to electromagnetic waves with a frequency between 0.1THZ and 10THZ. They are in the transition stage from macroscopic electronics to microscopic electronics, so they have many unique properties. It has important research value and broad application prospects in basic physical science, ultra-high-speed communication, high-resolution imaging, safety inspection, non-destructive testing, etc., and has great strategic significance for promoting national economic development and strengthening national security. [0003] When terahertz waves are transmitted in the air, water and oxygen in the air will cause a large transmission loss. In order to reduce the loss in the transmission process, a terahe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P11/00
CPCH01P11/002
Inventor 胡孝昀程浩曾永彬
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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