Pre-treatment improving target material binding method

A technology of pretreatment and target material, which is applied in the direction of metal material coating process, ion implantation plating, welding equipment, etc., can solve the problems of poor pretreatment effect, roughness and dimensional tolerance range, uneven heat dissipation and other problems of rotating targets, and achieve The conductive effect is uniform, the operation difficulty is reduced, and the binding effect is enhanced

Active Publication Date: 2019-10-22
东莞市欧莱溅射靶材有限公司
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Problems solved by technology

[0002] The pretreatment effect on the back tube of the rotating target and the metal target tube before binding directly affects the bonding firmness and welding rate of the rotating target binding. The low bonding firmness and welding rate make the rotating target in use Poor electrical conductivity, uneven heat dissipation, and easy to fall off will seriously affect the use of the product, so the pretreatment before binding of the rotating target is particularly important
[0003] The metal target tube is slender as a whole, and the length of the metal target tube is as long as 2.7 meters. Due to the precise control of the target structure, the inner wall of the target tube is processed by drilling, boring and other processes to process the size and shape of the inner circle, but the length There is a tolerance range in the roughness and size of the inner wall of the tube
Occasional surface defects caused by the roughness variation of the inner wall and tool vibration are unavoidable. During bonding, problems such as wetting and degassing at the recessed position will inevitably affect the bonding quality
The traditional metallization treatment uses ultrasound to enhance the bonding force between the bonding solder and the target tube, but for the rough inner wall of the long tube target that cannot be accurately measured and removed, a single ultrasonic metallization cannot ensure a relatively Venting and coating of sunken defects such as deep knife marks
And because the metal target tube is slender, when ultrasonically brushing the metallization layer on the metal target tube binding surface, it is impossible to check and judge the uniformity of the metallization layer on the metal target tube binding surface, and it is impossible to effectively ensure the bonding solder and the metal target There is sufficient wettability between the tubes, and the pretreatment effect of the rotating target before binding is poor, resulting in a low welding rate of the rotating target binding, and it is difficult to guarantee the quality of the rotating target binding

Method used

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Embodiment Construction

[0037] The following are only preferred embodiments of the present invention, and therefore do not limit the protection scope of the present invention.

[0038] A target binding method with improved pretreatment, comprising the following steps:

[0039] a. Steps before pretreatment, sandblasting, cleaning and drying the binding surface of the metal target tube and the binding surface of the back tube respectively;

[0040] Before the pretreatment of the metal target tube and the back tube, the metal target tube and the back tube must be pretreated, and the preliminary treatment includes sandblasting and cleaning the binding surface of the metal target tube and the back tube. Sandblasting makes the surface rough, increases the surface area, that is, the contact surface, and increases the adhesion of the coating on the sandblasting surface; the machining of the outer circle of the back tube can achieve a lower roughness, and the surface is smoother. The inner circle of the targe...

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Abstract

The invention discloses a pre-treatment improving target material binding method which comprises the following steps: a, a step before pre-treatment; b, a step of pre-treatment of a back tube; c, a step of pre-treatment of a metal target tube; and d, a binding step. According to the pre-treatment improving target material binding method provided by the invention, the pre-treatment effect before binding a rotary target is improved effectively, and the binding quality of the rotary target is improved.

Description

technical field [0001] The invention relates to the technical field of pretreatment of rotating target binding, in particular to a target binding method with improved pretreatment. Background technique [0002] The pretreatment effect on the back tube of the rotating target and the metal target tube before binding directly affects the bonding firmness and welding rate of the rotating target binding. The low bonding firmness and welding rate make the rotating target in use Poor electrical conduction, uneven heat dissipation, and easy falling off will seriously affect the use of the product, so the pretreatment before binding of the rotating target is particularly important. [0003] The metal target tube is slender as a whole, and the length of the metal target tube is as long as 2.7 meters. Due to the precise control of the target structure, the inner wall of the target tube is processed by drilling, boring and other processes to process the size and shape of the inner circl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B23K37/00C25D5/06C25D7/04
CPCB23K37/00C23C14/3414C25D5/06C25D7/04
Inventor 陈明恒
Owner 东莞市欧莱溅射靶材有限公司
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