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A kind of p-type monocrystalline perc battery and its manufacturing method

A production method and battery technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve problems such as attenuation, increased manufacturing costs, and decreased efficiency of batteries and components

Active Publication Date: 2021-04-27
JETION SOLAR HLDG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The more excess hydrogen, the worse the attenuation, resulting in lower cell and module efficiencies
In order to improve this problem, there are currently two research directions: one is to use low-defect high-quality silicon wafers, but this will lead to a substantial increase in manufacturing costs, which is not in line with the development trend of cost reduction and efficiency improvement in the photovoltaic industry; However, the current battery manufacturing process cannot reduce the hydrogen content, because when depositing SiNx films on the front and AlOx / SiNx stacked films on the back by PECVD, a large amount of hydrogen sources will be introduced, which will eventually lead to the battery Excess hydrogen atoms appear in the film, resulting in serious LeTID phenomenon

Method used

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  • A kind of p-type monocrystalline perc battery and its manufacturing method
  • A kind of p-type monocrystalline perc battery and its manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035]Step S1, the surface texture, also known as the alkali, i.e., the wafer substrate 4 is corroded by the base solution, forming a pyramid surface morphology, wherein the reaction base solution: 1.2 wt% of the reaction base solution: 1.2 wt% NaOH, reaction time: 400s, temperature: 80 ° C, reflectance after treatment: 11%;

[0036]Step S2, phosphorus diffusion, wherein the nitrogen flow: 700sccm, oxygen flow: 800sccm, reaction time: 88min, temperature: 800 ° C, diffusion square resistance: 120Ω / □; re-laser doping method In the front electrode 1 region to form a heavy dial The square resistance is: 95Ω / □;

[0037]Step S3, the periphery etching and back polishing, using a concentration of 49% of the HF acid solution to dissolve the back surface and the edge of the silicon wafer after diffusion of the step S2, and then polished the back surface of the silicon wafer using a concentration of 45% of KOH and polishing additives. Treatment, weight loss: 0.25g, back reflectance: 42%;

[0038]St...

Embodiment 2

[0045]Step S1, the surface texture, also known as the alkali, i.e., the wafer substrate 4 is corroded by the base solution, forming a pyramid surface morphology, wherein the reaction base solution: 1.2 wt% of the reaction base solution: 1.2 wt% NaOH, reaction time: 400s, temperature: 80 ° C, reflectance after treatment: 11%;

[0046]Step S2, phosphorus diffusion, wherein the nitrogen flow: 700sccm, oxygen flow: 800sccm, reaction time: 88min, temperature: 800 ° C, diffusion square resistance: 120Ω / □; re-laser doping method In the front electrode 1 region to form a heavy dial The square resistance is: 95Ω / □;

[0047]Step S3, the periphery etching and back polishing, using a concentration of 49% of the HF acid solution to dissolve the back surface and the edge of the silicon wafer after diffusion of the step S2, and then polished the back surface of the silicon wafer using a concentration of 45% of KOH and polishing additives. Treatment, weight loss: 0.25g, back reflectance: 42%;

[0048]St...

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Abstract

The present invention provides a P-type single crystal PERC battery and a manufacturing method thereof, comprising the following steps: step S1, surface texture; step S2, high-temperature phosphorus diffusion; step S3, peripheral etching and backside polishing; step S4, backside oxidation Aluminum layer preparation; step S5, silicon dioxide layer preparation; step S6, silicon oxynitride layer preparation; step S7, back laser grooving; step S8, front and back electrode preparation. On the premise of ensuring the passivation effect, the present invention reduces the source of hydrogen and reduces the redundant hydrogen atoms in the solar cell by changing the structure of the battery film layer, making raw materials and corresponding process optimization methods, so as to achieve the technical effect of improving the LeTID of the solar cell .

Description

Technical field[0001]The present invention relates to a solar cell and a method of fabricating the same, and more particularly to a P-type single crystal PERC battery and a method of fabricating its production, which belongs to the field of solar battery production.Background technique[0002]In recent years, mainstream products in the photovoltaic industry are doped P-type single crystal PERC (Passivated Emmiter Andrear Cell, also known as passivation emitter and back battery) solar cell, but the mainstream product has varying degrees of photostatic (LIGHT) Induced Degradation) and the phenomenon of light thermal attenuation (LetId, Light and ElevatedTemperature Induced Degradation). Photoelectric attenuation and phototherlation refer to a significant efficiency attenuation phenomenon in a certain high temperature and light conditions, and severely affect the power generation of the solar cell. At present, the industry is mainly to improve the LID of Perc batteries through various pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/0216H01L31/068
CPCH01L31/02167H01L31/02168H01L31/0682H01L31/1804Y02E10/547Y02P70/50
Inventor 康海涛郭万武吴中亚
Owner JETION SOLAR HLDG