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Inert gas high-temperature purification system

An inert gas, high-temperature purification technology, applied in the field of inert gas high-temperature purification system, can solve the problems of non-superconducting and superconducting magnet performance degradation, and achieve the effect of simple operation method and safe and reliable system

Active Publication Date: 2019-11-19
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

If the superconducting wire inside the coil is oxidized, the performance of the superconducting magnet will be degraded or even not superconducting.

Method used

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  • Inert gas high-temperature purification system
  • Inert gas high-temperature purification system

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Embodiment Construction

[0026] like figure 1 As shown, a high-temperature purification system for inert gas includes a gas source gas supply device 1, a pressure reducer one 2, two 4, three 12, four 17, a stop valve one 6, two 11, three 15, four 19, five 20, six 21, seven 25, eight 8, dehydration device 3, solid particle filter one 5, solid particle filter two 18, deoxidizer 9, high temperature gas purifier 13, cooling device 16 and gas content online detection equipment, in After the dehydration device 3 is connected to the gas source air supply device 1, the solid particle filter-5 is connected to the dehydration device 3, the deoxidizer 9 is connected to the solid particle filter-5, and the high-temperature gas purifier 13 is connected to the deoxidizer. After the device 9, the cooling device 16 is connected to the high temperature gas purifier 13, the solid particle filter 2 18 is connected to the cooling device 16, the oxygen analyzer 22, the dew point analyzer 23, and the hydrocarbon analyzer 2...

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Abstract

The invention discloses an inert gas high-temperature purification system, which uses an inert gas purification process combining physical adsorption, chemical adsorption, catalytic oxidation and other processes. The purification system comprises a gas source supply device, a molecular sieve dehydration device, a solid particle filtering device with a PTFE filtering core, a deoxidation device witha YBCO filtering core, a high-temperature filtering device with a precious metal filtering core, a cooling device, a gas content online detecting device and other related members. The operation method comprises the following stages: (1) heating by a heating furnace; (2) vacuumizing and cooling; (3) filtering and cooling; and (4) real-time monitoring. According to the present invention, the systemhas advantages of reliability, high performance price ratio, easy operation and high purity of the purified gas, and can meet the requirements of electronic industry, atmospheric heat treatment and the like on ultra-purified inert gases.

Description

technical field [0001] The invention relates to the technical field of inert gas purification, in particular to a high-temperature purification system for inert gas, an on-line monitoring method for oxygen content, water content, and hydrocarbon content in purified inert gas and a technology for controlling the content of impurity gas exceeding the standard. Up to 8N or more. Background technique [0002] High-purity inert gas is an indispensable supporting raw material for the electronic industry, atmospheric heat treatment, and medical fields. Common inert gases include argon, helium, and neon. Usually, the purity of the inert gas after being directly vaporized from a liquid state can only reach 5N, which cannot meet the requirements of ultra-high-purity gas. with Nb 3 Sn superconducting coil heat treatment as an example, to avoid superconducting wire oxidation and pollution during heat treatment is Nb 3 Key technical requirements for heat treatment of Sn superconductin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B23/00
CPCC01B23/0094C01B2210/0004C01B2210/0015C01B2210/0009C01B2210/0042
Inventor 于敏王维俊秦经刚
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI