Two-dimensional MEMS scanning galvanometer laser radar system
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
- Publication Date
- 2019-11-22
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Abstract
Description
technical field
[0001] The invention belongs to the field of laser radar detection, and in particular relates to a two-dimensional MEMS scanning vibrating mirror laser radar system. Background technique
[0002] LiDAR can be roughly divided into mechanical LiDAR and solid-state LiDAR. At present, the lidar with a large receiving field of view adopts a mechanical rotation structure, uses a laser light source and a turntable mechanical scanning system to scan the measured object point by point, and restores the data into the distance image of the target in sequence. When performing three-dimensional scanning, two-dimensional scanning is required, the structure is complex, the cost is high, and the resolution is not high. Applying MEMS micro-electro-mechanical systems to lidar can directly integrate a very compact micro-vibration mirror on a silicon-based chip, and the micro-vibration mirror that can rotate in two dimensions reflects the light of the laser to realize scanning....