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A hybrid drive mut unit structure and its parameterized excitation method

A unit structure, hybrid drive technology, applied in the direction of fluid using vibration, etc., can solve problems such as limiting receiving sensitivity

Active Publication Date: 2020-10-27
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the performance of piezoelectric materials used in conventional PMUTs currently limits the improvement of their receiving sensitivity.

Method used

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  • A hybrid drive mut unit structure and its parameterized excitation method
  • A hybrid drive mut unit structure and its parameterized excitation method
  • A hybrid drive mut unit structure and its parameterized excitation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] refer to Figure 1a , a hybrid driving MUT unit, which is composed of a piezoelectric driving module 11, a thin film structure layer 7, an electrostatic attraction module 12 and a base 9 arranged in sequence from top to bottom, and a boss 10 is arranged directly above the middle of the base 9.

[0035]The piezoelectric driving module 11 includes a piezoelectric upper electrode 1 , a dielectric layer 2 and a piezoelectric lower electrode 3 - 1 arranged sequentially from top to bottom. The piezoelectric upper electrode 1 and the piezoelectric lower electrode 3 - 1 can be patterned according to the required mode shape of the vibrating membrane 13 . The dielectric layer 2 is formed of a single piezoelectric material or composited of multiple piezoelectric materials combined with multiple insulating layers.

[0036] Preferably, the piezoelectric upper electrode 1 includes three concentric ring patterns, which are the outer ring electrode 14 , the central ring electrode 15 an...

Embodiment 2

[0051] Such as Figure 1b As shown, when the piezoelectric drive module 11 is stacked above the capacitor upper electrode 3-2, the stacking sequence from top to bottom along the thickness direction between the layers that make up the vibrating film 13 is: thin film structure layer 7, piezoelectric drive module 11. The upper electrode 3-2 of the capacitor; when the piezoelectric drive module 11 is stacked above the upper electrode 3-2 of the capacitor, the lower piezoelectric electrode 3-1 and the upper electrode 3-2 of the capacitor can share a layer of electrodes, and the above two electrodes The function of will be realized by the piezoelectric-capacitive common electrode 3 . The stacking order of the layers forming the vibrating film 13 from top to bottom along the thickness direction is: film structure layer 7 , piezoelectric upper electrode 1 , dielectric layer 2 and piezoelectric-capacitive common electrode 3 .

[0052] The vibrating membrane 13 is supported by a pillar...

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Abstract

The invention discloses a hybrid-driven MUT unit structure and a parameterized excitation method thereof. The hybrid-driven MUT unit structure combines a collapse working mode of a traditional CMUT unit and a drive mode of a PMUT unit. The method comprises the following steps that a bias voltage is applied in an ultrasonic emission state to enable a vibrating membrane to be in a collapsed state; aperiodic signal is superposed on the basis of the collapse bias voltage, so that a bonding state of a vibrating membrane collapse area and a sensor substrate is periodically changed, and the periodicregulation and control of bending rigidity of the vibrating membrane can be realized; and the other unbonded partial membranes are processed by adopting an ultrasonic emission method of the PMUT unitbased on an inverse piezoelectric effect so as to realize the vibration amplification of an MUT unit under a condition of variable rigidity. The hybrid-driven MUT unit structure and the parameterizedexcitation method thereof realize the parameterized excitation of the MUT unit and increase the emission sensitivity of the MUT unit.

Description

technical field [0001] The invention belongs to the technical field of ultrasonic transducers, and in particular relates to a hybrid driving MUT unit structure and a parameterized excitation method thereof. Background technique [0002] Micromachined Ultrasonic Transducer (MUT) based on MEMS technology has the characteristics of miniaturization, good impedance matching with fluid, batch preparation, easy two-dimensional array processing, and easy integration with ICs. Ultrasound imaging and therapy (Point of Care Diagnostics, POC), ultrasound biometric recognition, 3D ultrasound gesture recognition and non-contact control and other cutting-edge application fields have great application potential. Micro-ultrasonic transducers mainly include capacitive micromachined ultrasonic transducers (Capacitive Micromachined Ultrasonic Transducer, CMUT) and piezoelectric micromachined ultrasonic transducers (Piezoelectric Micromachined Ultrasonic Transducer, PMUT) two categories. Compar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/06
CPCB06B1/0644
Inventor 赵立波徐廷中郭帅帅李支康杨萍李杰赵一鹤刘子晨蒋庄德
Owner XI AN JIAOTONG UNIV