A vertical channel tunable high-throughput acoustofluidic sorting chip and its preparation method

Abstract

The invention discloses a vertical channel tunable high-flux acoustofluidic sorting chip and a preparation method thereof. The device is composed of a glass sheet with a standing wave resonant cavity, a piezoelectric ceramic sheet and a PDMS (polydimethylsiloxane) film. The standing wave resonant cavity is composed of a glass bottom plate, a glass spacer I, a glass spacer I, a glass spacer II, a PDMS film and a glass top plate, which are laminated and packaged sequentially from bottom to top. The resonant cavity consists of two chambers. There is a sample inlet and a sample outlet. The height of the resonant cavity is on the order of micrometers and the width is on the order of centimeters, so as to realize the fluid flow of large flux. The piezoelectric ceramic sheet is glued to the bottom of the resonant cavity and two wires are drawn out at the two poles. Driven by an external electrical signal, the piezoelectric ceramic generates a standing wave field in the vertical direction of the channel, and separates different particles from the vertical direction. The preparation process of the present invention is simple, the height of the channel is adjustable, the cost is low, the controllability is strong, and it is convenient and suitable for the aggregation, separation and manipulation of large flux of biological samples such as cells.

Description

technical field [0001] The invention belongs to the field of micro-total analysis, in particular to a tunable high-throughput acoustofluidic sorting chip based on a bulk acoustic wave vertical channel and a preparation method thereof. Background technique [0002] Microfluidic chip technology originated in the 1990s and was initially applied in the field of analytical chemistry. It is characterized by microchannels and life sciences as the main research object. Through micro-electromechanical processing technology (MEMS), the functions of the entire laboratory Including sample pretreatment, reaction, separation, detection, etc. are integrated on the microchip, which greatly improves the analysis speed. It has the characteristics of high integration, low reagent consumption, low production cost, and high analysis efficiency. It has extremely wide applicability and The application prospect is the focus of current research on the micro-total analysis system. [0003] For parti...

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Problems solved by technology

[0004] At present, in the microfluidic system, devices are sorted in the horizontal direction, resulting in a relatively low sorting flux (<1mL / min), and the preparation is complicated. Generally, wet etching is used on hard silicon wafers. Etch a micro-network structure on the material, drill holes on the silicon wafer with a pulse laser, and then bond the glass to the silicon wafer with the microstructure etched by anodic bonding to form an acoustic wave chip. Millions of anodic bonding equipment, which increases the cost of preparation

And it faces a high temperature and high voltage working environment, which is not conducive to the safety of the experimenter

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