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Gas sensor and preparation method thereof

A gas sensor and gas sensitive material technology, which is applied to instruments, scientific instruments, measuring devices, etc., can solve the problems of difficult control of the coating process, complicated preparation process, limited number of uses, etc., and achieves improved sensitivity, stable mechanical properties, Guaranteed service life

Inactive Publication Date: 2019-12-13
WENZHOU ELECTRIC POWER BUREAU +4
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the preparation process of such a heating method is complicated. It is necessary to first describe the electrode, remove the electrode, and then use vacuum sputtering, reaction evaporation, chemical vapor deposition, spray pyrolysis, sol-gel and other methods to coat the gas-sensitive material. High consumption, complex coating process and difficult to control, difficult to guarantee the stability of different batches of products, and the number of times the products are used after preparation is also limited

Method used

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preparation example Construction

[0029] A method for preparing a gas sensor, at least comprising the steps of:

[0030] Such as figure 2 Step 1 is shown as follows: drawing electrodes: place an insulating substrate 1 coated with metal conductive material on one side horizontally directly under the laser generator, with the side coated with metal conductive material facing down, and the laser beam is focused on the metal through the substrate. On the conductive material, thus depicting the interdigitated circuit;

[0031] Such as image 3 Shown is step 2: deposition material: select the gas-sensitive material, after the electrode characterization is completed, through the movement of the stage on the X and Y axes, the laser beam scans the gas-sensitive material tablet along the gap of the interdigitated circuit ;

[0032] The scanning uses an ultra-fast laser generator. Before scanning, the stage moves on the Z-axis to move the focus of the laser beam to the surface of the sensitive material under the glas...

Embodiment 1

[0036] (1) Firstly, ultrafast laser is used to describe the interdigitated electrodes. The quartz glass material is used as the insulating substrate 1 material, and the gold-plated film is used as the metal conductive material. The pulse energy range of electrode writing laser is 10~15μJ, the pulse repetition frequency is 10kHz, and the laser flux range is 3.5~4.0J / cm 2 , the laser scanning speed is about 10mm / s;

[0037] (2) The metal oxide gas-sensing material selected in this embodiment is tin oxide. In-situ deposition on the interdigitated electrode by ultrafast laser, the laser pulse energy range is 10μJ-25μJ, the pulse repetition frequency is 100-200Hz, and the laser flux is 3.5-4.0J / cm 2 , the laser scanning speed is 1mm / s;

[0038] (3) By the thermocouple 2 and the heating plate 3 on the sensor, the operating temperature of the tin oxide gas sensor is maintained at about 300°C;

[0039] (4) Select H at a concentration of 500 μL / L 2 As the standard mixed gas to be ...

Embodiment 2

[0042](1) Ultrafast laser is used to scribe interdigitated electrodes, quartz glass material is used as the insulating substrate 1 material, and a gold-plated film is used as the metal conductive material. The pulse energy range of electrode writing laser is 10~15μJ, the pulse repetition frequency is 10kHz, and the laser flux range is 3.5~4.0J / cm 2 , the laser scanning speed is about 10mm / s; (2) Use zinc oxide as the deposition material to make interdigital electrodes coated with zinc oxide gas-sensitive materials, the laser pulse energy range is 10μJ-25μJ, and the pulse repetition frequency is 100-200Hz , laser flux 3.5~4.0J / cm 2 , the laser scanning speed is 1mm / s;

[0043] (3) By the thermocouple 2 and the heating plate 3 on the sensor, the working temperature of the zinc oxide gas sensor is maintained at about 200°C;

[0044] (4) Select H at a concentration of 500 μL / L 2 As the standard mixed gas to be detected, argon is the background gas for purging;

[0045] (5) Obt...

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Abstract

The invention aims to provide a gas sensor and a preparation method thereof. The preparation procedures of sensor electrode depiction and a sensitive material coating process are concise and efficient, and a sensitive material has good consistency. Meanwhile, the service life is longer than that of an existing product. In order to achieve the purposes, the preparation method comprises the steps of1, electrode depiction; and 2, material deposition, wherein ultrafast lasers directly focus on the surface of a sensitive material tablet through an insulated substrate, the gas sensitive material forms a smoke beam which deposits upwards and is attached to the insulated substrate to form a flocculent grid three-dimensional structure in the scanning process, and preparation of the gas sensor is completed after scanning is over. By the adoption of the technical scheme, the two steps of electrode depiction and material deposition can be completed just through one laser generator in the whole process; the whole processing process is at relatively low temperature and belongs to cold processing; and the gas sensor can be directly put into use without a cooling step after being processed.

Description

technical field [0001] The disclosure relates to the field of equipment manufacturing, in particular to a gas sensor and a preparation method system thereof. Background technique [0002] Gas sensors play an increasingly important role in the field of modern technology and engineering. At present, the most commonly used gas sensing technology is to heat gas-sensitive materials such as tin oxide (SnO2) to a certain temperature, and use gas-sensitive materials to absorb gas. After the characteristics of its electrical properties change, the change of its resistance is measured to obtain the corresponding gas concentration. It can be seen that the process of preparing the gas sensor directly affects the accuracy and service life of the gas sensor. [0003] In the prior art, the invention patent application with the patent application number CN201910208836.3 "A Preparation Method of Gas Sensor Based on Laser Ablation Planar Interdigitated Electrode" discloses a preparation meth...

Claims

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Application Information

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IPC IPC(8): G01N27/12
CPCG01N27/12G01N27/127
Inventor 刘昕陈建胜刘主光潘勃利陈川孙亮邢照亮龚列谦陈海宏易永利陈达高策张正晓
Owner WENZHOU ELECTRIC POWER BUREAU