Three-dimensional displacement measurement system and method based on laser self-mixing grating interference
A technology of displacement measurement and grating interference, applied in measurement devices, optical devices, instruments, etc., can solve problems such as limited range, and achieve the effect of improving measurement resolution, high resolution, and high modulation accuracy
Active Publication Date: 2019-12-31
NANJING NORMAL UNIVERSITY
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Problems solved by technology
[0005] Purpose of the invention: The technical problem to be solved by the present invention is to provide a three-dimensional displacement measurement system and measurement method based on laser self-mixing grating interference, which solves the problem of limited range of traditional grating interferometers in out-of-plane displacement measurement, and at the same time compared with traditional The grating interferometer is more compact and maintains the advantages of self-collimation of the laser self-mixing interferometer, which can realize a simple structure, large range, high-resolution three-dimensional real-time displacement measurement system and measurement method
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[0030] The measurement system of this embodiment is as figure 1As shown, it includes a first semiconductor laser sensor head 1, a second semiconductor laser sensor head 2, a third semiconductor laser sensor head 3, a reflective two-dimensional plane grating 4, a first plane reflector 5, a second plane reflector Mirror 6, data acquisition card 7 and computer 8. The first semiconductor laser sensor head 1, the second semiconductor laser sensor head 2, and the third semiconductor laser sensor head 3 are perpendicular to the reflective two-dimensional planar grating 4, that is, the directions of their outgoing beams are perpendicular to the reflective two-dimensional planar grating 4 , their projections on the reflective two-dimensional planar grating 4 form an isosceles right triangle, the projection of the first semiconductor laser sensor head 1 is located at the apex of the triangle, the second semiconductor laser sensor head 2, and the third semiconductor laser sensor head 3 ...
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The invention discloses a three-dimensional displacement measurement system and method based on laser self-mixing grating interference, and the system comprises a semiconductor laser sensor head, a plane reflector, a reflective two-dimensional plane grating, a data acquisition card and a computer, wherein the laser emitted from the semiconductor laser sensor head is incident on the reflective two-dimensional grating, the corresponding diffracted light is fed back to the semiconductor laser sensor head along the original optical path to generate self-mixing interference, the self-mixing interference signal is converted into an electrical signal by the photodetector built in the semiconductor laser and is output to the data acquisition card to obtain three-dimensional displacement of the target to be measured after computer processing. The invention solves the problem that the range of a traditional grating interferometer is limited when performing out-of-plane displacement measurement,is more compact than the traditional grating interferometer, maintains the advantages of self-collimation of the laser self-mixing interferometer, and can realize three-dimensional real-time displacement measurement system and method with a simple structure, wide rang and high resolution.
Description
technical field [0001] The invention belongs to the technical field of precision displacement measurement, in particular to a three-dimensional displacement measurement system and measurement method based on laser self-mixing grating interference. Background technique [0002] Precision displacement measurement is the key technology for the development of advanced manufacturing industry, and also the forerunner and foundation of the entire field of nanotechnology. With the development of semiconductor manufacturing technology and ultra-fine processing technology, the demand for real-time high-precision three-dimensional positioning system is growing rapidly. Laser interferometer and grating interferometer are widely used in high-precision displacement measurement due to their advantages of non-contact, high resolution and wide dynamic measurement range. The laser interferometer takes the wavelength as the measurement basis, and is usually used to measure the out-of-plane di...
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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 郭冬梅施立恒汪弋平夏巍郝辉蔡文魁
Owner NANJING NORMAL UNIVERSITY
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