Manufacture method of liquid crystal on silicon device and liquid crystal on silicon device, and wavelength selective switch

Abstract

The invention provides a manufacture method of a liquid crystal on silicon device and the liquid crystal on silicon device, and a wavelength selective switch. The manufacture method of the liquid crystal on silicon device comprises steps of forming a liquid material film on a passivation layer covering a space between a bottom electrode and an adjacent bottom electrode, filling a dent on the passivation layer by using the liquid material film, then solidifying the liquid material film so as to form a solid covering film, etching the solid covering film so as to form a filling part filling thedent, then forming an alignment film covering the passivation layer and the filling part on a silicon wafer. The filling part fills the dent in the surface of the passivation layer, so that the alignment film prepared in later stage has a flatter surface, liquid crystal molecules in the liquid crystal layer are arranged in a continuous direction, the liquid crystal is homogeneous in property, andproducts like the wavelength selective switch have higher quality.

Description

technical field [0001] The invention relates to the technical field of optical equipment, in particular to a method for manufacturing a silicon-based liquid crystal device, a silicon-based liquid crystal device, and a wavelength selection switch. Background technique [0002] The wavelength selective switch (Wavelength Selective Switch, WSS) is the core optoelectronic device of the reconfigurable optical add-drop multiplexer (Reconfigurable Optical Add-Drop Multiplexer, ROADM), which can realize the optical signal switching of any wavelength or any combination of wavelengths on any port , attenuation or blocking, is one of the key products in the current optical communication industry. [0003] The wavelength selective switch generally includes an optical fiber array, a shaping lens, a diffraction grating, a converging lens, and a control chip. The optical signal input by the light array is collimated by the shaping lens, the light spot is shaped, and then passes through the...

AI Technical Summary

Problems solved by technology

In order to protect the bottom electrodes, it is usually necessary to form a passivation layer covering a plurality of bottom electrodes and the intervals between adjacent bottom electrodes on the silicon wafer. The alignment film is formed on the passivation layer. However, since the bottom electrodes are arranged at intervals , the passivation layer will form a depression corresponding to the interval between adjacent bottom electrodes, making the surface flatness of the passivation layer poor, which in turn leads to poor surface flatness of the alignment film, and cannot make the liquid crystal molecules in the liquid crystal layer have continuity The arrangement direction of the liquid crystal leads to non-uniform characteristics of the liquid crystal, which cannot meet the characteristic requirements applied to the wavelength selective switch

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