Electromagnetic suspension micro mass measurement system
A technology of electromagnetic levitation and measurement system, which is used in measurement devices, weighing, and analysis of solids using sonic/ultrasonic/infrasonic waves. The effect of high measurement accuracy
Pending Publication Date: 2020-01-17
ZHAOQING UNIV
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The accuracy of the micromass measured by this method is limited by the rigidity of the mechanical torsion beam, and there are also defects such as complex processing technology, low yield, and difficulty in replacing the mass block.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment
[0022] The mechanical structure of the electromagnetic levitation micromass measurement system is as follows: figure 1 As shown, it is mainly composed of a stator 3 and a mass block 2, and a micro-mass fixed slot 1 is installed in the center of the mass block; the stator mainly includes a resonant control electrode 31, a common electrode 32, a suspension coil 33, a stable coil 34 and pins 35, etc. Metal plane structure. The two resonant control electrodes are distributed on the stator in a semi-circular shape; the common electrode is in the center and is circular; the suspension coil and the stable coil form a closed structure, the suspension coil is distributed on the outer circumference of the ring where the resonance control electrode is located, and the stable coil is distributed on the suspension coil the periphery. The stator is provided with pin gaps, and the five pins lead out from the pin gaps along the radial direction of the stator, respectively, the resonant contr...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| diameter | aaaaa | aaaaa |
Login to View More
Abstract
The present invention discloses an electromagnetic suspension micro mass measurement system. The system comprises a detection signal generator, a pre-amplifier, a lock-in amplifier, an excitation signal generator, a high-voltage amplifier, a control voltage synthesizer, a phase-shifting circuit and a controller. The lock-in amplifier comprises a multiplying unit and a low-pass filter circuit thatare connected. The pre-amplifier comprises an I-V switching circuit and an amplifier that are connected. An input end of the controller is connected to the lock-in amplifier, and an output end of thecontroller is connected to the excitation signal generator. An excitation alternating voltage output by the excitation signal generator is amplified by the high-voltage amplifier, is processed by thecontrol voltage synthesizer, and then is output to a control electrode pair. A generated electrostatic force is used for controlling axial vibration of electromagnetic suspension micro mass to obtaina resonant frequency, and a change of the resonant frequency reflects a size of micro mass. The system can implement measurement of micro mass, and has an advantage of high measurement precision.
Description
[0001] 1. Technical field [0002] The invention relates to the field of micro-mass measurement in micro-electromechanical systems, in particular to an electromagnetic levitation micro-mass measurement system. [0003] 2. Background technology [0004] MEMS, or Microelectro Mechanical Systems, is a multidisciplinary cutting-edge research field developed on the basis of microelectronics technology. After more than 40 years of development, it has become one of the major scientific and technological fields attracting worldwide attention. It involves various disciplines and technologies such as electronics, machinery, materials, physics, chemistry, biology, and medicine, and has broad application prospects. The use of micro-processing technology to manufacture micro-devices and corresponding processing circuit design can be widely used in sensors and drivers. MEMS resonant mass measurement is one of the typical applications. The main principle is that by changing the inherent phys...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/12G01G3/16
CPCG01N29/12G01G3/16
Inventor 肖奇军肖超予罗忠辉
Owner ZHAOQING UNIV