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Preparation method of carbon nanotube, carbon nanotube fiber

A carbon nanotube fiber, carbon nanotube technology, applied in the direction of carbon nanotube, nanocarbon, fiber chemical characteristics, etc., can solve the problems of unsuitable carbon nanotube force, low yield, carbon nanotube array tube length, etc., To achieve the effect of optimizing and stabilizing the atmosphere in the furnace, increasing the gas diffusion coefficient, and avoiding inhomogeneity

Active Publication Date: 2020-10-13
SHENZHEN XIWAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a method for preparing carbon nanotubes, which aims to solve the problem that existing carbon nanotubes prepared by chemical vapor deposition methods still have low purity, poor structural integrity, poor uniformity of large-area size growth, and low yield. , the length of the carbon nanotube array is short, and the force between the carbon nanotubes is not moderate, which leads to technical problems such as the prepared carbon nanotube array is not conducive to direct spinning into carbon nanotube fibers.

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  • Preparation method of carbon nanotube, carbon nanotube fiber
  • Preparation method of carbon nanotube, carbon nanotube fiber
  • Preparation method of carbon nanotube, carbon nanotube fiber

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preparation example Construction

[0039] The embodiment of the present invention provides a method for preparing carbon nanotubes, comprising the following steps:

[0040] S10. Obtain the substrate on which the catalyst layer is deposited, and load the substrate on which the catalyst layer is deposited into the reaction furnace of the chemical vapor deposition equipment under a protective gas atmosphere;

[0041] S20. the reaction furnace is evacuated to 10 -2 Below Torr, inject protective gas so that the pressure in the furnace is 150-300 Torr, and keep it for more than 20 minutes;

[0042]S30. Then, under the condition that the injection rate of the protective gas is constant and the pressure in the furnace is constant, the temperature is raised to 600-800° C., and carbon source gas is introduced to grow carbon nanotubes to obtain carbon nanotubes.

Embodiment 1

[0072] A method for preparing carbon nanotubes, comprising the steps of:

[0073] S11, using a vacuum electron beam method to deposit an iron-cobalt-nickel catalyst layer on the silicon substrate with a thickness of 35 nanometers. The silicon substrate size is 8 inches.

[0074] S21. The substrate is loaded into the CVD furnace of the chemical vapor deposition equipment under the protection of the inert gas helium.

[0075] S31, the CVD furnace is vacuumed to 10 -2 Torr, and then inject protective gas helium, the pressure in the furnace is kept at 200 Torr, the helium flow rate is set at 500 sccm, and it is kept for 30 minutes.

[0076] S41, heating the CVD furnace to a specified temperature of 650°C.

[0077] S51. Keep the flow rate of helium constant, and at the same time, the pressure in the furnace is stabilized at 200 Torr. At the same time, ethylene gas and hydrogen gas are introduced in equal proportions, each flow rate is 30 sccm, and the growth of the carbon nanotu...

Embodiment 2

[0080] A method for preparing carbon nanotubes, comprising the steps of:

[0081] S12, using a vacuum electron beam method to deposit an iron-cobalt-nickel catalyst layer on the silicon substrate with a thickness of 30 nanometers. The silicon substrate size is 8 inches.

[0082] S22. The substrate is loaded into the CVD furnace of the chemical vapor deposition equipment under the protection of the inert gas helium.

[0083] S32, the CVD furnace is vacuumed to 10 -2Torr, and then inject protective gas helium, the pressure in the furnace is kept at 200 Torr, the helium flow rate is set at 800 sccm, and it is kept for 30 minutes.

[0084] S42, heating the CVD furnace to a specified temperature of 700°C.

[0085] S52. Keep the flow rate of helium constant, and at the same time, the pressure in the furnace is stable at 200 Torr. At the same time, ethylene gas and hydrogen gas are introduced in equal proportions, each flow rate is 40 sccm, and the growth of the carbon nanotube ar...

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Abstract

The invention belongs to the technical field of carbon nanotubes, and particularly relates to a preparation method of carbon nanotubes. The preparation method comprises the following steps: obtaininga substrate deposited with a catalyst layer, and loading the substrate deposited with the catalyst layer into a reaction furnace of chemical vapor deposition equipment in a protective gas atmosphere;vacuumizing the reaction furnace to 10 <-2 > Torr or below, injecting a protective gas to enable the pressure in the reaction furnace to be 150-300 Torr, and maintaining the pressure for 20 minutes orlonger; and heating to 600-800 DEG C under the conditions that the injection rate of the protective gas is not changed and the pressure in the reaction furnace is not changed, and introducing a carbon source gas for carbon nanotube growing, thereby obtaining the carbon nanotubes. According to the preparation method provided by the invention, the prepared carbon nanotubes are high in purity, goodin structural integrity, good in large-area size growth uniformity and high in length-diameter ratio by strictly regulating and controlling conditions such as growth pressure, flow velocity and temperature of the carbon nanotubes, and can be directly drawn and spun into carbon nanotube fibers.

Description

technical field [0001] The invention belongs to the technical field of carbon nanotubes, in particular to a method for preparing carbon nanotubes and a carbon nanotube fiber. Background technique [0002] Carbon nanotubes have a perfect one-dimensional tubular structure, low density, high mechanical strength, good electrical and thermal conductivity and other excellent physical properties, and have attracted widespread attention since their discovery. However, to realize the practical application of carbon nanotubes, it is usually necessary to assemble them into macroscopic structures, such as fibers, films, etc. Among them, carbon nanotube fiber is a macroscopic continuous fiber formed by the arrangement of thousands of single carbon nanotubes along its axial direction, which has the characteristics of light weight, high strength, high conductivity, and multifunctionality. Carbon nanotube fibers are expected to be used as high-performance composite material reinforcements,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/162D01F9/12
CPCC01B32/162C01B2202/26C01B2202/30C01B2202/34C01B2202/36D01F9/12
Inventor 邓飞辛培培
Owner SHENZHEN XIWAN TECH CO LTD
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