High-sensitivity miniature magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of high-sensitivity miniature magnetic sensing unit

A high-sensitivity, magnetic-sensing technology, applied in the field of magnetic sensors, can solve the problem of lack of high-sensitivity micro-magnetic sensors for underwater vehicles, and achieve the effects of reducing weight and volume, reducing production costs, and achieving good consistency

Inactive Publication Date: 2020-02-11
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current research directions at home and abroad are mainly focused on the research of bionic magnetic nav

Method used

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  • High-sensitivity miniature magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of high-sensitivity miniature magnetic sensing unit
  • High-sensitivity miniature magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of high-sensitivity miniature magnetic sensing unit
  • High-sensitivity miniature magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of high-sensitivity miniature magnetic sensing unit

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specific Embodiment approach 1

[0028] Specific implementation mode one: refer to Figure 1 to Figure 6 This embodiment is specifically described. A high-sensitivity miniature magnetic sensor unit for underwater navigation described in this embodiment includes a bias magnetic field belt layer 3, a set The reset current belt layer 4, the four-terminal Wheatstone bridge magnetoresistance layer 5 and the lead layer 6, and the two adjacent layers are electrically insulated by a silicon dioxide layer.

[0029] The bias magnetic field belt layer 3 includes two resistance windings arranged side by side, each resistance winding is spirally arranged to form a rectangular spiral structure, and the wire ends of the two resistance windings located in the outer circle are connected. The material of the resistance winding is aluminum, the line width is 10 μm, the thickness is 1 μm, and the total length of the two resistance windings is 3.1×10 4 μm.

[0030] Specifically, in this embodiment, MEMS technology is used to fa...

specific Embodiment approach 2

[0036] Specific embodiment two: This embodiment is a sensor containing a high-sensitivity miniature magnetic sensing unit for underwater navigation described in specific embodiment one. This embodiment includes a tube shell 1 and a magnetic field sensing unit 2, and the magnetic field The sensing unit 2 is located inside, the tube shell 1 is made of ceramic material, the magnetic field sensing unit 2 is pasted in the tube shell 1, and the pins of the magnetic field sensing unit 2 are connected with the pins of the tube shell 1 through a pressure welding process.

specific Embodiment approach 3

[0037] Specific embodiment three: This embodiment is a method for preparing a high-sensitivity miniature magnetic sensing unit for underwater navigation described in specific embodiment one. This embodiment includes the following steps:

[0038] step one:

[0039] An aluminum layer with a thickness of 1 μm was prepared on a single crystal silicon substrate with a [1 0 0] crystal orientation by thermal evaporation; two rectangular helical structures arranged side by side were drawn on the metal layer by photolithography, and the two rectangular helical structures The ends located in the outer ring are connected, and the width of the lines drawn by the photoresist in the photolithography process is 10 μm, and the length is 3.1×10 4 μm, with a thickness of 2 μm; the single crystal silicon substrate with photoresist is etched in phosphoric acid at 80°C for 1min to 2min, and the photoresist is removed to obtain a bias magnetic field tape layer 3 .

[0040] Step two:

[0041] Util...

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Abstract

The invention discloses a high-sensitivity miniature magnetic sensing unit for underwater navigation, a sensor comprising the same and a preparation method of a high-sensitivity miniature magnetic sensing unit, and relates to the field of magnetic field detection. The invention aims to make up the blank of lack of miniature magnetic sensors suitable for underwater vehicles at home and abroad. Thehigh-sensitivity miniature magnetic sensing unit is prepared by adopting an MEMS process, so that the weight and the size of the sensor can be effectively reduced; a miniature magnetic sensor is manufactured by taking monocrystalline silicon as a substrate, so that the error can be controlled within 10 microns and is far higher than that of conventional machining, and the miniature magnetic sensorhas good consistency in the machining and manufacturing process. The high-sensitivity miniature magnetic sensing unit for underwater navigation, the sensor comprising the same and the preparation method of the high-sensitivity miniature magnetic sensing unit can be applied to the fields of magnetic target detection, magnetic field flaw detection and the like, and provide high-precision navigationand positioning information for underwater vehicles.

Description

technical field [0001] The invention belongs to the field of magnetic field detection, in particular to a magnetic sensor. Background technique [0002] Navigation problem is the key to the development of underwater navigation technology and autonomous underwater vehicle AUV. At present, the inertial navigation system is the most widely used technology in the field of underwater navigation, but it has the problem of accumulating positioning errors over time. Satellite navigation system technology also has the problem of rapid attenuation of wireless signals in water. Therefore, the navigation method using the earth's magnetic field has attracted extensive attention from research institutions and scholars at home and abroad. [0003] Geomagnetic navigation technology has the characteristics of passive concealment, all-weather, and all-region, and can provide high-precision navigation and positioning information for underwater vehicles. High-sensitivity magnetic sensors are...

Claims

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Application Information

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IPC IPC(8): G01R33/00G01R33/06G01C25/00
CPCG01C25/00G01R33/0052G01R33/06
Inventor 孙立凯宋尔冬蒋茜黄尧王辉徐兴烨邵志强
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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