Vertical structure LED integrated with DBR and forming method thereof
A vertical structure, conductive substrate technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of low photoelectric conversion efficiency, slow LED response speed, etc., to improve electro-optical conversion efficiency, waveguide mode suppression, and improve light extraction efficiency. Effect
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[0047] The specific implementation of the DBR-integrated vertical structure LED provided by the present invention and its forming method will be described in detail below with reference to the accompanying drawings.
[0048] This specific embodiment provides a vertical structure LED integrating DBR (Distributed Bragg Reflector, distributed Bragg reflector), with figure 1 It is a structural schematic diagram of a vertical structure LED integrated with a DBR in a specific embodiment of the present invention. Such as figure 1 As shown, the vertical structure LED integrated DBR provided in this specific embodiment includes:
[0049] a conductive substrate 10 having a first surface and a second surface opposite to the first surface;
[0050] A first DBR layer 12 located on the first surface of the conductive substrate 10;
[0051] The epitaxial layer 11, located on the first DBR layer 12, includes a first contact layer 115, a quantum well layer 112 and a second contact layer 114...
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