Vertical structure LED integrated with DBR and forming method thereof
A vertical structure, conductive substrate technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of low photoelectric conversion efficiency, slow LED response speed, etc., to improve electro-optical conversion efficiency, waveguide mode suppression, and improve light extraction efficiency. Effect
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[0047] The specific implementation of the vertical structure LED with integrated DBR provided by the present invention and its forming method will be described in detail below with reference to the accompanying drawings.
[0048] This embodiment provides a vertical structure LED integrated with DBR (Distributed Bragg Reflector, distributed Bragg reflector). figure 1 It is a schematic diagram of a vertical structure LED with integrated DBR in a specific embodiment of the present invention. Such as figure 1 As shown, the vertical structure LED with integrated DBR provided in this embodiment includes:
[0049] A conductive substrate 10 having a first surface and a second surface opposite to the first surface;
[0050] The first DBR layer 12 is located on the first surface of the conductive substrate 10;
[0051] The epitaxial layer 11, located on the first DBR layer 12, includes a first contact layer 115, a quantum well layer 112, and a second contact layer 114 that are sequentially stac...
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