EMSIW humidity sensor based on Kapton 500HN

Abstract

The invention discloses an EMSIW humidity sensor based on Kapton 500HN. The sensor is a reflective passive sensor used for measuring environment humidity and comprises a metal sheet at a bottom layer,a humidity sensitive dielectric plate Kapton500HN at a middle layer, and a section of microstrip line at a top layer, wherein one end of the whole microstrip line structure extends out of a feedbacklong pin and is used for connecting an SMA connection head. Physical size of the EMSIW cavity is reduced by 87.5%, and the EMSIW cavity can maintain the same main resonance frequency. The sensor has the function of measuring environment humidity, has excellent performance like high sensitivity and high accuracy, and has a simple, small structure, wide measurement range, and high practicability.

Description

technical field [0001] The invention belongs to the field of microwave technology, and relates to a sensor excited by a microstrip line, in particular to a miniaturized microwave for measuring humidity based on an eighth mode substrate integrated waveguide (Eight Mode Substrate integrated waveguide-EMSIW). sensor. Background technique [0002] With the increasing progress of social economy and the continuous improvement of people's living standards, humidity sensors have been widely used in industry, agriculture, medical treatment, food packaging and people's family life. A qualified humidity sensor not only needs to meet the requirements of linear response and fast sensitivity, but also needs to meet the requirements of wide humidity range, low cost, and small hysteresis. Therefore, how to quickly and accurately obtain the humidity parameters in the environment has become the focus of common attention in the academic and industrial circles. [0003] Among traditional humi...

AI Technical Summary

Problems solved by technology

Resistive sensors are inexpensive and show good performance in the mid-humidity range, but resistive meters are less responsive at lower humidity

In addition, they suffer from problems such as large size, low yield, current drift, and difficult integration with complementary metal-oxide-semiconductor (CMOS) circuits, which limit the development of resistive humidity sensors.

[0004] In addition, although the humidity sensitive material of ZnO / SnO2 mixed oxide has good humidity sensitive performance in the range of 5%-85% humidity change, its disadvantages such as poor temperature stability and poor gas selectivity cause high energy consumption of the sensor. , which is gradually replaced by other sensors

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