Sample structure, manufacturing method thereof and incident space angle calibration method

Abstract

The invention provides a sample structure, a manufacturing method thereof, and an incident space angle calibration method. The sample structure comprises a substrate, a metal film located on the substrate, and a nanostructure located in or on the metal film. The sample is simple in structure, easy in manufacturing method. However, under the irradiation of inclined incident light, the generated near-field light field distribution can be detected by the SNOM, and has good response to the incident light space angle, and can be used for SNOM near-field light field imaging, so that the incident light space angle component is reversely deduced according to the SNOM near-field light field imaging measurement result, and the calibration of the incident light space angle of the SNOM equipment is realized. The calibration method is simple and easy to implement, the sample structure preparation process is simple, the calibration method can be used as a standard sample to calibrate the incident light space angles of scattering type scanning near-field optical microscopes built by different manufacturer models or laboratories, the application range is wide, and mass production can be achieved.

Description

technical field [0001] The invention belongs to the technical field of nano-optical measurement, and in particular relates to a sample structure, a preparation method thereof, and an incident space angle calibration method. Background technique [0002] Scattering Scanning Near-field Optical Microscopy (s-SNOM) is an optical super-resolution microscopy technique based on scanning probes, which is mainly used to characterize the micro area (micron-nanoscale) on the sample. Near-field light field distribution. The basic principle is: use the AFM probe to focus and illuminate the laser beam, and excite a nano-scale enhanced near-field signal area near the tip of the needle. When the tip is close to the sample surface, the near-field optical information will change accordingly due to the difference in the dielectric properties of different substances. By analyzing the collected scattered signals through the background suppression technology, the near-field light field imaging ...

AI Technical Summary

Problems solved by technology

[0004] In view of this, the present invention provides a sample structure and its manufacturing method, and an incident space angle calibration method to solve the problem in the prior art that there is no effective means for direct measurement and precise calibration of the incident light space angle

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